公开(公告)号：EP1783554A1

公开(公告)日：2007-05-09

申请号：EP05751379.8

申请日：2005-06-16

申请人： TOHOKU UNIVERSITY ,  Nihon Ceratec Co., Ltd. ,  TAIHEIYO CEMENT CORPORATION

发明人： OHMI, Tadahiro; ,  TAKEHISA, Kiwamu; ,  MORIYAMA, S., NIHON CERATEC CO., LTD. ,  SASAKI, S., NIHON CERATEC CO., LTD. ,  HIROSE, M., NIHON CERATEC CO., LTD. ,  ISHII, M., TAIHEIYO CEMENT CORPORATION ,  SUGAYA, T., TAIHEIYO CEMENT CORPORATION ,  KATAOKA, M., TAIHEIYO CEMENT CORPORATION ,  UMEZU, Motohiro c/o TAIHEIYO CEMENT CORPORATION

IPC分类号： G03F7/20 ,  H01L21/027 ,  H01L21/68

CPC分类号： G03F7/7095 ,  G03F7/70716 ,  G03F7/70825

摘要： In a stage member for use in an exposure apparatus, a honeycomb structural body has walls that are extended in a direction perpendicular to a longitudinal direction of the stage member and that surround square shaped prismatic spaces, so as to accomplish a high resistance and a high resonant frequency with respect to torsional vibration. The honeycomb structural body of the stage member is preferably made of a ceramic material.

摘要翻译： 在曝光装置中使用的舞台构件中，蜂窝结构体具有沿与舞台构件的长度方向垂直的方向延伸并且围绕方形棱柱形空间延伸的壁，以实现高电阻和高 谐振频率相对于扭转振动。 台架构件的蜂窝结构体优选由陶瓷材料制成。