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1.发明公开Method of measuring the depth of full-cut dicing grooves by using an ultrasonic detector and a dicing apparatus for carrying out the same 失效用于测量全切网格沟槽的深度与超声波检测器和用于实现该方法切割装置的方法。
公开(公告)号：EP0612978A1
公开(公告)日：1994-08-31
申请号：EP94301056.1
申请日：1994-02-14
IPC分类号： G01B17/00
CPC分类号： G01B17/00
摘要： The present invention provides a method of measuring the depth of a dicing groove, employing an ultrasonic detector, capable of measuring the depth of the groove in a high accuracy when the groove is cut in a full-cut mode. A method according to the present invention employes an ultrasonic detector which emits ultrasonic waves, measures the time interval between the emission of the ultrasonic waves and the return of their echo, the phase difference between the emitted ultrasonic waves and the reflected ultrasonic waves, or both the time interval and the phase difference to measure the depth of the groove. The method of the present invention is featured by determining the depth of the dicing groove on the basis of the depth of the groove formed in an exposed area of the adhesive sheet not occupied by the workpiece.
摘要翻译： 本发明提供测量切割槽的深度，使用超声波的检测器的，能够测量槽的深度在高精度当槽在全切割的方式切割的方法。 雅丁到在超声波检测器，其发射超声波本发明聘用过的员工的方法，测量超声波的发射及回声返回，所发射的超声波和反射的超声波，或两者之间的相位差之间的时间间隔 的时间间隔和相位差来测量槽的深度。 本发明的方法是通过确定性挖掘功能在工件上的粘合片的暴露区域形成的槽的深度的基础上切割槽的未被占据的深度。
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2.发明授权Method of measuring the depth of full-cut dicing grooves by using an ultrasonic detector and a dicing apparatus for carrying out the same 失效用于测量全切网格沟槽的深度与超声波检测器和用于实现该方法切割装置的方法
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