摘要:
A method for the combustion of specific exhaust gases such as silane-containing exhaust gases discharged from a reaction furnace in which a combustible gas is supplied to and burnt around the top end of a nozzle for the exhaust gases, thereby forming a flame barrier around the top end of the nozzle, and the exhaust gases are introduced from the top end of the nozzle to the inside of the flame barrier to be compulsorily burnt by the flame ahead of the barrier of the flame atmosphere.
摘要:
A method for the combustion of specific exhaust gases such as silane-containing exhaust gases discharged from a reaction furnace in which a combustible gas is supplied to and burnt around the top end of a nozzle for the exhaust gases, thereby forming a flame barrier around the top end of the nozzle, and the exhaust gases are introduced from the top end of the nozzle to the inside of the flame barrier to be compulsorily burnt by the flame ahead of the barrier of the flame atmosphere.