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1.发明公开GRANULAR THIN MAGNETIC FILM AND METHOD OF MANUFACTURING THE FILM, LAMINATED MAGNETIC FILM, MAGNETIC PART, AND ELECTRONIC DEVICE 审中-公开“颗粒薄膜磁铁及其制造方法膜的叠层磁性膜，磁性元件和电子元件的”
公开(公告)号：EP1361586A1
公开(公告)日：2003-11-12
申请号：EP02715778.3
申请日：2002-01-17
发明人： KOBAYASHI, Kazuyoshi, c/o TAIYO YUDEN CO., LTD. , IKEDA, Kenji,c/o TAIYO YUDEN CO., LTD. , FUJIMOTO, Masayuki,c/o TAIYO YUDEN CO., LTD.
CPC分类号： H01F41/301 , B82Y25/00 , B82Y40/00 , H01F10/007 , H01F10/132 , H01F10/138 , H01F10/3227 , H01F41/183 , H05K9/0084 , Y10T428/12493 , Y10T428/12535 , Y10T428/12611 , Y10T428/12618 , Y10T428/3183 , Y10T428/32
摘要： There are provided a magnetic thin film utilizing a granular film and having excellent high frequency characteristics and a method of manufacturing the same, and a multilayered magnetic film and magnetic components and electronic equipment utilizing the same.
A nonreactive sputtering is performed so that there is no oxidation of a magnetic metal, and a saturation magnetization is increased to increase a resonant frequency of permeability. Also, a multi-target simultaneous sputtering is combined with the nonreactive sputtering so that in a granular structure including magnetic grains and an insulating layer a size of the magnetic grains and a thickness of the insulating layer are optimized thereby ensuring a proper magnitude for a crystalline magnetic anisotropy within the grains and excellent soft magnetic properties. Further, the optimization of the thickness of the insulating layer has the effect of improving a resistivity, decreasing an eddy current and improving an exchange interaction between the magnetic grains.摘要翻译： 本发明提供一种磁性薄膜利用的粒状膜并且具有优异的高频特性和制造的方法，和一个多层磁膜和磁性元件和电子设备利用相同的。 一种非反应性的溅射被执行以thatthere是无磁性金属的氧化，和饱和磁化强度增加，以增加磁导率的谐振频率。 所以，多靶同时溅射相组合与所述非反应性溅射，从而在一个粒状结构，其包括磁性颗粒并绝缘层的尺寸的磁性颗粒的和的厚度的绝缘层的那样由此优化确保一个适当的量值对于晶体 晶粒和优良的软磁特性内磁各向异性。 此外，绝缘层的厚度的优化具有提高的电阻率，涡流和磁性粒子之间的交换相互作用的改进的降低的效果。
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