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公开(公告)号:EP4042495A1
公开(公告)日:2022-08-17
申请号:EP20785737.6
申请日:2020-10-01
发明人: KLEEMANN, Hans , CUCCHI, Matteo , LEO, Karl , SCHOLZ, Veronika , TSENG, Hsin , LEE, Alexander
IPC分类号: H01L51/05
公开(公告)号:EP4042495A1
公开(公告)日:2022-08-17
申请号:EP20785737.6
申请日:2020-10-01
发明人: KLEEMANN, Hans , CUCCHI, Matteo , LEO, Karl , SCHOLZ, Veronika , TSENG, Hsin , LEE, Alexander
IPC分类号: H01L51/05