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    APPARATUS AND METHOD FOR INSPECTING A SAMPLE USING A PLURALITY OF CHARGED PARTICLE BEAMS
    1.
    发明公开
    APPARATUS AND METHOD FOR INSPECTING A SAMPLE USING A PLURALITY OF CHARGED PARTICLE BEAMS 有权
    装置和方法用于分析样品的具有多带电粒子束

    公开(公告)号：EP3140848A1

    公开(公告)日：2017-03-15

    申请号：EP15726384.9

    申请日：2015-04-23

    申请人： Technische Universiteit Delft

    发明人： KRUIT, Pieter ,  ZONNEVYLLE, Aernout Christiaan ,  REN, Yan

    IPC分类号： H01J37/28

    CPC分类号： H01J37/28 ,  H01J37/141 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/24495 ,  H01J2237/2802 ,  H01J2237/2808

    摘要： An apparatus for inspecting a sample includes a sample holder for holding the sample; a multi beam charged particle generator for generating an array of primary charged particle beams; an electro-magnetic lens system for directing the array of primary charged particle beams into an array of separate focused primary charged particle beams on the sample; a multi-pixel photon detector arranged for detecting photons created by the focused primary charged particle beams when the primary charged particle beams impinge on the sample or after transmission of said primary charged particle beams through the sample; and an optical assembly for conveying photons created by at least two adjacent focused primary charged particle beams of the array of separate focused primary charged particle beams to distinct and/or separate pixels or to distinct and/or separate groups of pixels of the multi-pixel photon detector.

    摘要翻译： 用于检查的样品的装置，包括用于保持所述样品的样品保持器; 多波束的带电粒子发生器，用于在初级带电粒子束的阵列生成; 于电磁透镜系统，用于初级带电粒子束的阵列引导到在单独的主聚焦在样品的带电粒子束的阵列; 布置成用于检测由聚焦初级带电粒子束创建当一次带电粒子束对样品或通过样品所述主带电粒子束的传输之后撞击光子的多像素光子检测器; 并用于传送由单独的聚焦初级带电粒子束以不同和/或独立的像素或所述多像素的像素的不同的和/或单独的组的所述阵列的至少两个相邻的聚焦初级带电粒子束产生的光子的光学组件 光子检测器。