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公开(公告)号：EP1515042A3
公开(公告)日：2005-09-28
申请号：EP04255438.6
申请日：2004-09-08
申请人： The BOC Group plc
摘要： A multi-stage vacuum pump (10) comprises a first piston (18) in a first cylinder (14) defining a first stage pumping chamber (34) and a second piston (20) in a second cylinder (16) defining a second stage pumping chamber (36). The pump has a spool valve (88) between the first and second cylinders for controlling flow from the first stage pumping chamber to the second stage pumping chamber. The first and second cylinders and the pistons therein each being stepped so as to define a third stage pumping chamber. The spool valve (88) is arranged to control the flow from the second stage pumping chamber to the third stage pumping chamber.
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公开(公告)号：EP1515042A2
公开(公告)日：2005-03-16
申请号：EP04255438.6
申请日：2004-09-08
申请人： The BOC Group plc
摘要： A multi-stage vacuum pump (10) comprises a first piston (18) in a first cylinder (14) defining a first stage pumping chamber (34) and a second piston (20) in a second cylinder (16) defining a second stage pumping chamber (36). The pump has a spool valve (88) between the first and second cylinders for controlling flow from the first stage pumping chamber to the second stage pumping chamber. The first and second cylinders and the pistons therein each being stepped so as to define a third stage pumping chamber. The spool valve (88) is arranged to control the flow from the second stage pumping chamber to the third stage pumping chamber.
摘要翻译： 多级真空泵（10）包括限定第一级增压室（34）的第一缸（14）中的第一活塞（18）和限定第二级的第二缸（16）中的第二活塞（20） 泵室（36）。 该泵在第一和第二气缸之间具有滑阀（88），用于控制从第一级泵室到第二级泵室的流动。 第一和第二气缸以及其中的活塞每个都是阶梯式的以限定第三级泵室。 滑阀（88）布置成控制从第二级泵送室到第三级泵送室的流动。
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