公开(公告)号：EP1700161B1

公开(公告)日：2018-01-24

申请号：EP04812651.0

申请日：2004-12-01

申请人： The Board of Trustees of the University of Illinois

发明人： ROGERS, John, A. ,  JEON, Seokwoo ,  PARK, Jangung

IPC分类号： G03F7/00 ,  G03F7/20

CPC分类号： B81C99/00 ,  B82B3/00 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  G03F1/50 ,  G03F7/70283 ,  G03F7/703 ,  G03F7/7035 ,  G03F7/70408 ,  Y10S430/146

摘要： The present invention provides methods and devices for fabricating 3D structures and patterns of 3D structures on substrate surfaces, including symmetrical and asymmetrical patterns of 3D structures. Methods of the present invention provide a means of fabricating 3D structures having accurately selected physical dimensions, including lateral and vertical dimensions ranging from 10s of nanometers to 1000s of nanometers. In one aspect, methods are provided using a mask element comprising a conformable, elastomeric phase mask capable of establishing conformal contact with a radiation sensitive material undergoing photoprocessing. In another aspect, the temporal and/or spatial coherence of electromagnetic radiation using for photoprocessing is selected to fabricate complex structures having nanoscale features that do not extend entirely through the thickness of the structure fabricated.