公开(公告)号：EP4450954A1

公开(公告)日：2024-10-23

申请号：EP24159364.9

申请日：2024-02-23

申请人： The Boeing Company

发明人： GUNTHER, Brian ,  WEGNER, James Thaddeus ,  MURPHY, Jeffery Thomas

IPC分类号： G01N21/21 ,  G01N21/31 ,  G01N21/55 ,  G01N21/39 ,  G01N21/88

摘要： A reflectometer configured to test a sample. The reflectometer includes a light source that emits a light beam to the sample that is placed on a sample holder. The reflectometer focuses the light beam to a reduced spot size on the sample. The reflectometer is configured to view structure/defects in the sample using a detector that is downstream from the sample.