公开(公告)号：EP3110628A1

公开(公告)日：2017-01-04

申请号：EP15754603.7

申请日：2015-02-27

申请人： The Regents of the University of California

发明人： BOSER, Bernhard ,  HORSLEY, David ,  PRZYBYLA, Richard ,  ROZEN, Ofer ,  SHELTON, Stefon

IPC分类号： B60B1/06

CPC分类号： H01L41/335 ,  B06B1/0622 ,  B06B1/0666 ,  G10K9/121 ,  G10K9/122 ,  G10K13/00 ,  H01L41/083 ,  H01L41/0973 ,  H01L41/1138 ,  H01L41/187 ,  H01L41/332

摘要： A diaphragm for a piezoelectric micromachined ultrasonic transducer (PMUT) is presented having resonance frequency and bandwidth characteristics which are decoupled from one another into independent variables. Portions of at least the piezoelectric material layer and backside electrode layer are removed in a selected pattern to form structures, such as ribs, in the diaphragm which retains stiffness while reducing overall mass. The patterned structure can be formed by additive, or subtractive, fabrication processes.

摘要翻译： 提出一种用于压电微机械超声换能器隔膜（PMUT）具有彼此解耦成独立变量的谐振频率和带宽特性。 至少在压电材料层和背面电极层的部分在选定的图案被去除，以形成结构，：诸如肋，在隔膜保留刚度，同时降低整体质量。 该图案化结构可通过添加剂，或减法，制造工艺来形成。

公开(公告)号：EP3022683A1

公开(公告)日：2016-05-25

申请号：EP14825944.3

申请日：2014-07-14

申请人： The Regents of the University of California

发明人： LU, Yipeng ,  HORSLEY, David ,  TANG, Hao-Yen ,  BOSER, Bernhard

IPC分类号： G06K9/00

CPC分类号： G06K9/0002

摘要： MEMS ultrasound fingerprint ID systems are provided. Aspects of the systems include the capabilty of detecting both epidermis and dermis fingerprint patterns in three dimensions. Also provided are methods of making and using the systems, as well as devices that include the systems.

公开(公告)号：EP3110628B1

公开(公告)日：2019-07-03

申请号：EP15754603.7

申请日：2015-02-27

申请人： The Regents of the University of California

发明人： BOSER, Bernhard ,  HORSLEY, David ,  PRZYBYLA, Richard ,  ROZEN, Ofer ,  SHELTON, Stefon

IPC分类号： B06B1/06 ,  G10K9/122 ,  G10K13/00 ,  H01L41/09