PROBE MICROSCOPY AND PROBE POSITION MONITORING APPARATUS
    1.
    发明公开
    PROBE MICROSCOPY AND PROBE POSITION MONITORING APPARATUS 审中-公开
    探针显微镜及其探针位置监控装置

    公开(公告)号:EP2142906A1

    公开(公告)日:2010-01-13

    申请号:EP08736908.8

    申请日:2008-04-09

    IPC分类号: G01N13/14 G12B21/06

    CPC分类号: G01Q20/02 G01Q60/22

    摘要: A method of determining the position of a probe tip. An evanescent electromagnetic field is generated extending beyond an interface boundary between a first medium, having a first refractive index, and a second medium, having a second refractive index which is greater than the first refractive index, the interface boundary extending in a plane. A probe tip is positioned in the evanescent field in the first medium thereby causing propagating electromagnetic radiation to be produced as a result of the disruption of the evanescent field by the probe tip, and at least a portion of the propagating electromagnetic radiation is collected. The spatial intensity distribution of the collected radiation is detected with respect to an image plane. An at least one dimensional position of the probe tip in a probe tip plane is determined from the detected spatial intensity distribution, the probe tip plane being a plane which contains the probe tip and which is substantially parallel to the plane of the interface boundary.

    SCANNING NEAR-FIELD OPTICAL MICROSCOPE
    2.
    发明授权
    SCANNING NEAR-FIELD OPTICAL MICROSCOPE 有权
    近场

    公开(公告)号:EP1360538B1

    公开(公告)日:2004-11-10

    申请号:EP02711015.4

    申请日:2002-02-06

    IPC分类号: G02B21/00 G01B11/30 G01N21/59

    CPC分类号: G01Q60/22 G01B9/04

    摘要: A scanning near-field optical microscope detects the evanescent field formed about an illuminated sample (14) via an interaction between the field and a local probe (20). The probe (20) is scanned across the sample surface in order to collect a complete image as a succession of scan lines. In the microscope of this invention, image collection is more rapidly performed by translating the probe (20) whilst it is oscillated at or near its resonance frequency. In this way a series of scan lines covering an area of the sample surface are rapidly collected, the length of each scan line being determined by oscillation amplitude.

    SCANNING NEAR-FIELD OPTICAL MICROSCOPE
    3.
    发明公开
    SCANNING NEAR-FIELD OPTICAL MICROSCOPE 有权
    NAHFELDRASTERMIKROSKOP

    公开(公告)号:EP1360538A1

    公开(公告)日:2003-11-12

    申请号:EP02711015.4

    申请日:2002-02-06

    IPC分类号: G02B21/00 G01B11/30 G01N21/59

    CPC分类号: G01Q60/22 G01B9/04

    摘要: A scanning near-field optical microscope detects the evanescent field formed about an illuminated sample (14) via an interaction between the field and a local probe (20). The probe (20) is scanned across the sample surface in order to collect a complete image as a succession of scan lines. In the microscope of this invention, image collection is more rapidly performed by translating the probe (20) whilst it is oscillated at or near its resonance frequency. In this way a series of scan lines covering an area of the sample surface are rapidly collected, the length of each scan line being determined by oscillation amplitude.