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    Test wafer for detecting position
    1.
    发明公开
    Test wafer for detecting position 审中-公开
    测试晶片zur Positionserkennung

    公开(公告)号：EP2020588A1

    公开(公告)日：2009-02-04

    申请号：EP08013778.9

    申请日：2008-07-31

    申请人： Tokyo Electron Limited

    发明人： Matsumoto, Toshiyuki ,  Minami, Tomohide ,  Douki, Yuichi ,  Mahara, Koji

    IPC分类号： G01B7/00 ,  H01L21/00

    CPC分类号： G01B7/003 ,  H01L21/67259

    摘要： A position alignment of a transfer point of a transfer arm is performed by using a position detecting wafer capable of being loaded into an apparatus having a thin transfer port. The position detecting wafer S includes an electrostatic capacitance detecting sensor 50 for detecting an electrostatic capacitance in relation with a reference object for the position alignment. The electrostatic capacitance detecting sensor 50 includes a plurality of electrostatic capacitance detecting electrodes 52, each forming the electrostatic capacitance in relation with the reference object; and a control circuit 51 for controlling a detection of the electrostatic capacitance by each electrostatic capacitance detecting electrode 52, while communicating with each electrostatic capacitance detecting electrode 52. The electrostatic capacitance detecting electrodes 52 are provided on a rear surface of the position detecting wafer S, and the control circuit 51 is provided on a front surface of the position detecting wafer S.

    摘要翻译： 通过使用能够加载到具有薄的传送端口的设备的位置检测晶片来执行传送臂的传送点的位置对准。 位置检测晶片S包括用于检测与用于位置对准的参考对象相关的静电电容的静电电容检测传感器50。 静电电容检测传感器50包括多个静电电容检测电极52，每个静电电容检测电极形成与参考对象相关的静电电容; 以及控制电路51，用于在与每个静电电容检测电极52通信的同时控制每个静电电容检测电极52的静电电容的检测。静电电容检测电极52设置在位置检测晶片S的后表面上， 并且控制电路51设置在位置检测晶片S的前表面上。

    Detection apparatus and method of physical variable
    4.
    发明公开
    Detection apparatus and method of physical variable 有权
    Frequenzdetektor

    公开(公告)号：EP1653771A1

    公开(公告)日：2006-05-03

    申请号：EP06000364.7

    申请日：1999-02-19

    申请人： TOKYO ELECTRON LIMITED

    发明人： Matsumoto, Toshiyuki ,  Hirota, Yoshihiro ,  Harada, Muneo ,  Miyano, Takaya

    IPC分类号： H04R15/02 ,  G01H11/06 ,  G01D5/241

    CPC分类号： G01D5/2417 ,  G01D5/24 ,  G01D5/2405 ,  G01H11/06 ,  H04R5/04

    摘要： An apparatus for detecting amplitudes of frequency components contained in a vibration signal, characterized in that the apparatus comprises: a resonator array (20) comprising: first and second diaphragms (21 and 22) and a transversal beam (23) connected between them through which a vibration signal transverses from the first to the second diaphragm (22), a plurality of lateral beams (24) extending from the transversal beam (23) have different lengths to have different vibration resonant frequencies, respectively; and a plurality of first electrodes (25) attached to the lateral beams (24) and a plurality of second electrodes (26) which are stationary, the respective pairs of electrodes (25 and 26) forming capacitance sensors, a capacitance each of which varies in response to distance between the electrodes (25 and 26); a plurality of oscillators (11), a plurality of counters (4) for counting outputs of the oscillators (11), and signal processing means (2) for processing the count values from the counters (4) to provide amplitudes of respective frequency components which are contained in the vibration signal applied to the first diaphragm (21).

    摘要翻译： 一种用于检测包含在振动信号中的频率分量的振幅的装置，其特征在于，所述装置包括：谐振器阵列（20），包括：第一和第二隔膜（21和22）和连接在它们之间的横向波束（23） 振动信号从第一隔膜（22）横向延伸，从横向波束（23）延伸的多个横梁（24）分别具有不同的长度以具有不同的振动共振频率; 和安装在横梁（24）上的多个第一电极（25）和固定的多个第二电极（26），各对电极（25和26）形成电容传感器，每个电容变化 响应于电极（25和26）之间的距离; 多个振荡器（11），用于计数振荡器（11）的输出的多个计数器（4）以及用于处理来自计数器（4）的计数值的信号处理装置（2），以提供各个频率分量 其被包含在施加到第一隔膜（21）的振动信号中。