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公开(公告)号：EP2584312B1
公开(公告)日：2020-02-05
申请号：EP10853230.0
申请日：2010-06-16
IPC分类号： G01C19/574 , G01P15/125 , G01P15/14 , G01P15/18 , G01P3/22 , G01P15/08
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公开(公告)号：EP2743639B1
公开(公告)日：2018-09-19
申请号：EP11870767.8
申请日：2011-08-09
发明人： NARITA, Katsutoshi
IPC分类号： G01C19/56 , G01B7/00 , B81B3/00 , G01C19/5733
CPC分类号： G01B7/14 , B81B3/0086 , B81B2201/033 , G01C19/5733
摘要： The displacement amount monitoring electrode structure according to the present invention is for maintaining the amplitude of the detection mass at a constant target amplitude even when the relative relationship between a fixed electrode and a movable electrode changes, and includes a fixed electrode and a movable electrode each having a comb-teeth shape including a base part and electrode fingers extending from the base part in a predetermined axis direction parallel to a substrate, the fixed electrode and the movable electrode facing each other such that the electrode fingers of the fixed electrode and the electrode fingers of the movable electrode are meshed together, the fixed electrode being fixed to the substrate and the movable electrode being able to be displaced in the predetermined axis direction, wherein the displacement amount monitoring electrode structure monitors a displacement amount of a detection mass to be driven at a target amplitude based on a change amount of a capacitance between the fixed electrode and the movable electrode, wherein a change sensitivity of the change amount of the capacitance with respect to a displacement amount of the movable electrode in the predetermined axis direction, becomes larger after the displacement of the movable electrode in the predetermined axis direction reaches a target displacement amount corresponding to the target amplitude of the detection mass, compared to before the displacement of the movable electrode reaches the target displacement amount.
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公开(公告)号：EP2749841B1
公开(公告)日：2016-12-28
申请号：EP11847885.8
申请日：2011-08-26
发明人： NARITA, Katsutoshi
IPC分类号： G01C19/56 , G01B7/00 , G01C19/5747 , G01P15/125
CPC分类号： G01P15/125 , G01C19/5747
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公开(公告)号：EP2743639A1
公开(公告)日：2014-06-18
申请号：EP11870767.8
申请日：2011-08-09
发明人： NARITA, Katsutoshi
IPC分类号： G01C19/56 , G01B7/00 , B81B3/00 , G01C19/5733
CPC分类号： G01B7/14 , B81B3/0086 , B81B2201/033 , G01C19/5733
摘要： The displacement amount monitoring electrode structure according to the present invention is for maintaining the amplitude of the detection mass at a constant target amplitude even when the relative relationship between a fixed electrode and a movable electrode changes, and includes a fixed electrode and a movable electrode each having a comb-teeth shape including a base part and electrode fingers extending from the base part in a predetermined axis direction parallel to a substrate, the fixed electrode and the movable electrode facing each other such that the electrode fingers of the fixed electrode and the electrode fingers of the movable electrode are meshed together, the fixed electrode being fixed to the substrate and the movable electrode being able to be displaced in the predetermined axis direction, wherein the displacement amount monitoring electrode structure monitors a displacement amount of a detection mass to be driven at a target amplitude based on a change amount of a capacitance between the fixed electrode and the movable electrode, wherein a change sensitivity of the change amount of the capacitance with respect to a displacement amount of the movable electrode in the predetermined axis direction, becomes larger after the displacement of the movable electrode in the predetermined axis direction reaches a target displacement amount corresponding to the target amplitude of the detection mass, compared to before the displacement of the movable electrode reaches the target displacement amount.
摘要翻译： 根据本发明的位移量监测电极结构用于即使当固定电极和可动电极之间的相对关系改变时也将检测质量的振幅保持在恒定的目标振幅，并且每个静电电极和可动电极分别包括固定电极和可动电极 具有梳齿形状，所述梳齿形状包括基部和从所述基部沿平行于基板的预定轴方向延伸的电极指，所述固定电极和所述可动电极彼此面对，使得所述固定电极的电极指和所述电极 所述可动电极的手指啮合在一起，所述固定电极固定在所述基板上，所述可动电极能够在所述规定轴方向上位移，所述位移量监视电极结构监视被驱动的检测块的位移量 在基于ca的变化量的目标幅度处 在所述固定电极和所述可动电极之间具有电容，其中，所述可动电极在所述规定的轴上的位移后，所述静电电容的变化量相对于所述可动电极的所述规定的轴向的位移量的变化灵敏度变大 与可动电极的位移达到目标位移量之前相比，达到与检测质量的目标振幅对应的目标位移量。
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公开(公告)号：EP2749841A1
公开(公告)日：2014-07-02
申请号：EP11847885.8
申请日：2011-08-26
发明人： NARITA, Katsutoshi
CPC分类号： G01P15/125 , G01C19/5747
摘要： According to a displacement amount monitoring electrode arrangement of the present invention, in order to keep a constant target amplitude even if a relative relationship between a fixed electrode and a movable electrode changes, there are at least one linear change region in which the change amount of capacitance changes linearly with the displacement of the movable electrode in the predetermined axis direction, and at least one nonlinear change region in which the change amount of the capacitance changes nonlinearly with the displacement of the movable electrode in the predetermined axis direction. The nonlinear change region includes a characteristic in which a change sensitivity of the change amount of the capacitance with respect to the displacement amount of the movable electrode in the predetermined axis direction is greater than that in the linear change region, and a target capacitance change amount of the capacitance when the displacement of the movable electrode in the predetermined axis direction reaches a target displacement amount corresponding to the target amplitude is set in the nonlinear change region.
摘要翻译： 根据本发明的位移量监视电极配置，即使固定电极和可动电极之间的相对关系改变，为了保持恒定的目标振幅，存在至少一个线性变化区域，其中变化量 电容随着可动电极在预定轴方向上的位移而线性地变化，以及至少一个非线性变化区，其中电容的变化量随着可动电极在预定轴方向上的位移而非线性地变化。 非线性变化区域包括这样的特性，其中电容的变化量相对于可动电极在预定轴线方向上的位移量的变化灵敏度大于线性变化区域中的变化量，并且目标电容变化量 当所述可动电极在所述预定轴方向上的位移达到与所述目标振幅相对应的目标位移量时，所述电容被设定在所述非线性变化区域中。
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公开(公告)号：EP2584312A1
公开(公告)日：2013-04-24
申请号：EP10853230.0
申请日：2010-06-16
IPC分类号： G01C19/56 , G01P9/04 , G01P15/125
CPC分类号： G01C19/574 , G01P3/22 , G01P15/0888 , G01P15/125 , G01P15/14 , G01P15/18 , G01P2015/0805
摘要： A compound sensor includes a first unit including first and second oscillators symmetrically disposed to each other and being able to be displaced in a driving direction and a detecting direction; a second unit including third and fourth oscillators symmetrically disposed to each other and being able to be displaced in the driving direction and the detecting direction; a drive unit configured to drive the first, second, third and fourth oscillators so as to oscillate the first and second oscillators in opposite phase to each other, and the third and fourth oscillators in opposite phase to each other, and so as to oscillate the first unit and the second unit in opposite phase to each other; and a detection unit configured to detect displacements of the first, second, third and fourth oscillators in the detecting direction.
摘要翻译： 复合传感器包括第一单元，其包括彼此对称地布置并且能够在驱动方向和检测方向上移位的第一和第二振荡器; 第二单元，包括彼此对称设置并能够在驱动方向和检测方向上移位的第三和第四振荡器; 驱动单元，被配置为驱动所述第一，第二，第三和第四振荡器，以使所述第一和第二振荡器彼此相反相位振荡，并且所述第三和第四振荡器彼此相位相位，并且使所述驱动单元 第一单元和第二单元彼此相反; 以及检测单元，被配置为检测所述检测方向上的所述第一，第二，第三和第四振荡器的位移。
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