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    MEMS SENSOR ZU MESSUNG MINDESTENS EINER MESSGRÖSSE EINES FLUIDS
    3.
    发明公开
    MEMS SENSOR ZU MESSUNG MINDESTENS EINER MESSGRÖSSE EINES FLUIDS 审中-公开

    公开(公告)号：EP3368867A1

    公开(公告)日：2018-09-05

    申请号：EP16763274.4

    申请日：2016-09-12

    申请人： TrueDyne Sensors AG ,  Endress+Hauser Flowtec AG

    发明人： REITH, Patrick ,  HUBER, Christof ,  FETH, Hagen

    IPC分类号： G01F1/84

    CPC分类号： G01F1/8445 ,  G01F1/8404 ,  G01F1/849 ,  G01F1/8495 ,  G01N9/36 ,  G01N11/16

    摘要： The invention relates to a MEMS sensor for measuring at least one measurement variable, in particular a density, a flow rate, and/or a viscosity, of a flowing fluid, which has at least one microfluidic channel (1, 21) with at least one channel section (7, 7a, 27) which can be caused to vibrate, and comprises an exciter device (E) for exciting a use vibration mode in which the channel section (7, 7a, 27) executes vibrations in a predefined vibration plane (x-y), which has improved vibration properties, which are achieved in that the channel section (7, 7a, 27) consists of an anisotropic material with direction-dependent elasticity, which is spatially oriented in such a way that a modulus of elasticity of the material relevant for a stiffness of the channel section (7, 7a, 27) with respect to deflections of the channel section (7, 7a, 27) running perpendicular to the vibration plane (x-y) is greater than a modulus of elasticity relevant for a stiffness of the channel section (7, 7a, 27) with respect to deflections of the channel section (7, 7a, 27) running in the vibration plane (x-y).