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公开(公告)号：EP3363270A1
公开(公告)日：2018-08-22
申请号：EP15781620.8
申请日：2015-10-12
发明人： SCHULZ, Robert , BECK, Torsten
摘要： The invention relates to a method for producing plasma or laser pulses (14) by means of radiofrequency excitation pulses (13), wherein a medium is excited by radiofrequency excitation pulses (13) for meeting plasma or laser pulse specifications (11). The radiofrequency excitation pulses (13) are set at least partly dependent on a preceding radiofrequency excitation of the medium. The radiofrequency excitation pulses (13) are set at least in part in such a way that the radiofrequency excitation pulses (13) become ever stronger, in particular are shortened by way of changing the start and/or end times thereof, as a residual excitation of the medium by the preceding radiofrequency excitation increases. Furthermore, the invention relates to a control unit for a radiofrequency excitation pulse generator, a radiofrequency excitation pulse generator and an apparatus for generating plasma or laser pulses (14) by means of radiofrequency generation pulses (13), in particular a gas-discharge laser.
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公开(公告)号：EP3363270B1
公开(公告)日：2019-12-25
申请号：EP15781620.8
申请日：2015-10-12
发明人： SCHULZ, Robert , BECK, Torsten
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