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    A glass carbon coated graphite chuck for use in producing polycrystalline silicon
    1.
    发明公开
    A glass carbon coated graphite chuck for use in producing polycrystalline silicon 失效
    用玻璃碳涂覆的石墨卡盘在生产多晶硅的使用。

    公开(公告)号：EP0529593A1

    公开(公告)日：1993-03-03

    申请号：EP92114512.4

    申请日：1992-08-26

    申请人： UCAR CARBON TECHNOLOGY CORPORATION

    发明人： Lewis,Irwin Charles ,  Miller,Douglas J.(nmn) ,  Pirro,Terrence Anthony

    IPC分类号： C23C16/24 ,  C01B31/02 ,  C23C18/02 ,  C23C18/12

    CPC分类号： C23C16/4418 ,  C23C16/24

    摘要： A graphite chuck for use in supporting a heated starter filament which thermally decomposes a gaseous silicon compound such that silicon is deposited on the starter filament and wherein the graphite chuck has an outer coated layer of glassy carbon formed from a thermoset organic resin that prevents the reaction of the interior graphite chuck with the by-products from the silicon decomposition process so that carbon-free polycrystalline silicon can be produced.

    摘要翻译： 的石墨卡盘以用于支撑被加热的起动机细丝热分解测试没有硅沉积在起动灯丝和worin石墨卡盘的气态硅化合物具有由热固性有机树脂形成没有玻璃碳的外涂覆层防止反应 与副产物从硅酮分解过程的内部石墨卡盘的所以没有游离碳的多晶硅可被制作。