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    MASS ANALYZER AND USE THEREOF
    1.
    发明公开
    MASS ANALYZER AND USE THEREOF 有权
    MASSENSPEKTROMETER UND VERWENDUNG DAVON

    公开(公告)号：EP1895296A1

    公开(公告)日：2008-03-05

    申请号：EP06746538.5

    申请日：2006-05-17

    申请人： ULVAC, INC.

    发明人： Nakajima, Toyoaki ,  Yoshizawa, Hideki

    IPC分类号： G01N27/62

    CPC分类号： G01N27/62 ,  G01M3/202 ,  H01J41/10 ,  H01J49/00

    摘要： A mass spectrometer is provided which is mounted on a wall portion of a chamber and analyzes a gas to be analyzed existing in the chamber. The mass spectrometer includes: a measurement unit which is inserted into the chamber at the time of mounting the mass spectrometer to the chamber and measures each partial pressure of gaseous components in the gas to be analyzed with respect to mass-to-charge ratios; a control unit which is disposed outside of the wall portion at the time of mounting the mass spectrometer on the chamber and is used to manipulate the measurement unit; and a display unit which is disposed outside of the wall portion at the time of mounting the mass spectrometer on the chamber and displays the measurement result of the measurement unit. Here, the measurement unit, the control unit, and the display unit are disposed close to each other.

    摘要翻译： 提供了一种质谱仪，其安装在室的壁部分上并分析存在于腔室中的待分析气体。 质谱仪包括：测量单元，其在将质谱仪安装到室时插入室中，并测量关于质荷比的待分析气体中的气体组分的每个分压; 控制单元，其在将所述质谱仪安装在所述室上时设置在所述壁部的外侧，并用于操纵所述测量单元; 以及显示单元，其在将质谱仪安装在室上时设置在壁部的外侧，并显示测量单元的测量结果。 这里，测量单元，控制单元和显示单元彼此靠近配置。