公开(公告)号：EP3699946A1

公开(公告)日：2020-08-26

申请号：EP18869340.2

申请日：2018-09-28

申请人： ULVAC, Inc.

发明人： SASAKI Naruyasu ,  HIGASHI Akio ,  TERASAWA Toshihiro

IPC分类号： H01J27/20 ,  C23C14/48 ,  H01J37/08 ,  H01J37/317 ,  H01L21/265 ,  H05H1/24

摘要： There is provided a long-lasting and durable ion source (10) which can generate a large amount of aluminum ions. A cathode electrode (22) arranged in a chamber (21) is heated by energization of a filament (20) to heat a raw-material block (28) which is arranged sideways on the cathode electrode(22) and includes aluminum nitride. The raw-material block (28) reacts with an introduced fluorine-compound gas, so that aluminum fluoride is emitted. A thermoelectron which is emitted from the cathode electrode (22) and is accelerated reciprocally moves between the cathode electrode (22) and a repeller electrode (23), to decompose an aluminum-fluoride gas and generate an aluminum ion. A long-lasting and durable ion source (10) which can generate a large amount of aluminum ions can be obtained.