公开(公告)号：EP2100985A1

公开(公告)日：2009-09-16

申请号：EP09001334.3

申请日：2009-01-30

申请人： UNION TOOL CO.

发明人： Sato, Akira ,  Kawamura, Kazuhiro ,  Yamaya, Takanori

IPC分类号： C23C14/06 ,  C23C28/00 ,  C23C30/00

CPC分类号： C23C30/005 ,  C23C14/0641

摘要： A hard film is provided having excellent abrasion resistance in cutting high hardness quenched steel. There is provided a hard film for a cutting tool that is to be formed on a base material, wherein the hard film has a multilayered film layer formed by alternately layering two or more layers each of a first film layer and a second film layer; the first film layer is a film layer that contains at least Al and Cr as metal components, N as a non-metal component, and unavoidable impurities; the second film layer is a film layer that contains at least Ti and Si as metal and semimetal components, N as a non-metal component, and unavoidable impurities; the thickness of each of the first film layers and the second film layers is set to 1 nm or more and 20 nm or less; and the second film layer has a mixed structure of an amorphous part and granular micro crystals having an average particle diameter of 1 nm or more and 20 nm or less, wherein 10 or more micro crystals of the second film layer penetrate into the adjacent first film layer to a depth of 10% or more of the thickness of the first film layer in an area of 1 µm × 1 µm when the multilayered film layer is observed using a cross section TEM method.

摘要翻译： 提供了在切割高硬度淬火钢时具有优异的耐磨性的硬膜。 提供了一种用于形成在基材上的切割工具的硬膜，其中硬膜具有通过交替层叠第一膜层和第二膜层的两层或多层而形成的多层膜层; 第一膜层是至少包含Al和Cr作为金属成分，N作为非金属成分和不可避免的杂质的膜层; 第二膜层是至少含有Ti和Si作为金属和半金属成分，N作为非金属成分和不可避免的杂质的膜层; 每个第一膜层和第二膜层的厚度设定为1nm以上且20nm以下; 并且所述第二膜层具有平均粒径为1nm以上且20nm以下的非晶部分和粒状微晶的混合结构，其中，所述第二膜层的10个以上的微晶体贯穿相邻的第一膜 当使用横截面TEM方法观察多层膜层时，以1μm×1μm的面积形成第一膜层的厚度的10％以上的深度。