公开(公告)号：EP0756580A4

公开(公告)日：1997-07-16

申请号：EP95918262

申请日：1995-04-18

申请人： UNIV RUTGERS ,  KEAR BERNARD ,  CHANG WENG ,  SKANDAN GANESH ,  HAHN HORST W

发明人： KEAR BERNARD ,  CHANG WENG ,  SKANDAN GANESH ,  HAHN HORST W

IPC分类号： B01J12/02 ,  B01J19/18 ,  B01J19/24 ,  C01B21/068 ,  C01B21/082 ,  C01B31/36 ,  C04B35/626 ,  C30B25/00 ,  C01B33/00 ,  F25B29/00 ,  F28D11/02 ,  F28G13/00

CPC分类号： B82Y30/00 ,  B01J12/02 ,  B01J19/18 ,  B01J19/2415 ,  B01J2219/00085 ,  B01J2219/00094 ,  B01J2219/00162 ,  B01J2219/00164 ,  C01B21/068 ,  C01B21/0828 ,  C01B32/956 ,  C01P2002/72 ,  C01P2004/10 ,  C01P2004/50 ,  C01P2004/64 ,  C01P2006/10 ,  C01P2006/12 ,  C01P2006/60 ,  C01P2006/80 ,  C04B35/626 ,  C30B25/005 ,  C30B29/36 ,  C30B29/38 ,  F02B2275/14 ,  Y02T10/123 ,  Y10S977/776 ,  Y10S977/835 ,  Y10S977/84

摘要： An apparatus of forming non-agglomerated nanostructured ceramic (n-ceramic) powders from metalorganic precursors combines rapid thermal decomposition of a precursor/carrier gas stream in a hot tubular reactor with rapid condensation of the product particles on a cold substrate under a reduced inert gas pressure of 1-50 mbar. A wide variety of metalorganic precursors is available. The apparatus is particularly suitable for formation of n-SiCxNy powders from hexamethyl-disilizane or the formation of n-ZrOxCy powders from zirconium tertiary butoxide. The n-SiCxNy compounds can be further reacted to form SiC or Si3N4 whiskers, individually or in random-weave form, by heating in a hydrogen or ammonia atmosphere. The non-agglomerated n-ceramic powders form uniformly dense powder compacts by cold pressing which can be sintered to theoretical density at temperatures as low as 0.5 Tm. By appropriate choice of precursor compound and carrier gas, this apparatus can be used to produce nanoosized powders of almost any desired material, including metals, intermetallics, semiconductors, superconductors, ferro-electrics, optically active materials and magnetic materials, as well as their composites.

摘要翻译： 从金属有机前体形成非凝聚的纳米结构陶瓷（n-陶瓷）粉末的装置将热管式反应器中的前体/载气流的快速热分解与产物颗粒在还原惰性气体下在冷底物上快速冷凝 压力为1-50毫巴。 有各种各样的金属有机前体可用。 该装置特别适用于从六甲基二硅氮烷形成n-SiCxNy粉末或由叔丁醇锆形成正ZrOxCy粉末。 可以通过在氢气或氨气氛中加热，使n-SiC x N y化合物单独地或以随机编织形式进一步反应形成SiC或Si 3 N 4晶须。 未凝聚的n型陶瓷粉末通过冷压形成均匀致密的粉末压坯，其可以在低至0.5Tm的温度下烧结至理论密度。 通过适当选择前体化合物和载气，该装置可用于生产几乎任何所需材料的纳米尺寸粉末，包括金属，金属间化合物，半导体，超导体，铁电，光学活性材料和磁性材料，以及它们的复合材料 。