PLASMA GENERATION DEVICE
    3.
    发明公开

    公开(公告)号:EP2779803A4

    公开(公告)日:2015-07-01

    申请号:EP12848289

    申请日:2012-11-12

    申请人: UNIV SAGA

    摘要: There is provided a plasma generation device capable of suppressing arc discharge in which discharge is localized to cause a high temperature, and allowing atmospheric discharge plasma to be stably generated with a high generation efficiency in a low temperature at about a room temperature without being spatially biased. The plasma generation device arranged with a plurality of electrodes facing each other includes a discharge position control unit, which is arranged between each of the plurality of electrodes, and is formed by containing an inverse characteristic material composed of a fluid having polarizability and a property that dielectric constant decreases with an increase in temperature, in a container formed of a dielectric material, wherein the inverse characteristic material is spaced apart from each of the plurality of electrodes.