公开(公告)号：EP1206675B1

公开(公告)日：2005-06-29

申请号：EP00954748.0

申请日：2000-08-18

申请人： UNIVERSITY COLLEGE LONDON

发明人： BEARD, Paul ,  MILLS, Timothy Noel ,  DELPY, David

IPC分类号： G01B9/02

CPC分类号： G01B9/02023 ,  G01B2290/25

摘要： A method of forming an interferometer film for an interferometer sensor comprises forming a parylene polymer layer (8) of substantially uniform thickness directly on an interferometer substrate (4;45), the layer forming the interferometer film. Since the interferometer film (8) is formed directly onto the surface of the interferometer substrate, there is improved conformity between the two surfaces at the interface between the polymer layer and the substrate and improved uniformity in the thickness of the film.

公开(公告)号：EP1206675A1

公开(公告)日：2002-05-22

申请号：EP00954748.0

申请日：2000-08-18

申请人： UNIVERSITY COLLEGE LONDON

发明人： BEARD, Paul ,  MILLS, Timothy Noel ,  DELPY, David

IPC分类号： G01B9/02

CPC分类号： G01B9/02023 ,  G01B2290/25

摘要： A method of forming an interferometer film for an interferometer sensor comprises forming a parylene polymer layer (8) of substantially uniform thickness directly on an interferometer substrate (4;45), the layer forming the interferometer film. Since the interferometer film (8) is formed directly onto the surface of the interferometer substrate, there is improved conformity between the two surfaces at the interface between the polymer layer and the substrate and improved uniformity in the thickness of the film.