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公开(公告)号:EP0882240A1
公开(公告)日:1998-12-09
申请号:EP97906456.0
申请日:1997-02-11
CPC分类号: G01R33/10 , G01N27/82 , G01R27/2623 , Y10S505/842 , Y10S505/846 , Y10S505/849
摘要: A cryogenic apparatus for microscopy of physical properties of an object including a thin, stiff, transparent substrate or window (28) within the outer wall of the vacuum space (18) of a dewar and a cryogenic sensor (72) within the vacuum space and spaced very close distances to the window (28). This construction allows for positioning a sample for measurement outside of the vacuum space, at room temperature or higher and for microscopy of physical properties of the sample (91) by monitoring the output from the cryogenic sensor as it is scanned along the surface of the sample (91).
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公开(公告)号:EP0882240B1
公开(公告)日:2004-12-29
申请号:EP97906456.5
申请日:1997-02-11
CPC分类号: G01R33/10 , G01N27/82 , G01R27/2623 , Y10S505/842 , Y10S505/846 , Y10S505/849
摘要: A cryogenic apparatus for microscopy of physical properties of an object including a thin, stiff, transparent substrate or window (28) within the outer wall of the vacuum space (18) of a dewar and a cryogenic sensor (72) within the vacuum space and spaced very close distances to the window (28). This construction allows for positioning a sample for measurement outside of the vacuum space, at room temperature or higher and for microscopy of physical properties of the sample (91) by monitoring the output from the cryogenic sensor as it is scanned along the surface of the sample (91).
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