公开(公告)号：EP1409762A1

公开(公告)日：2004-04-21

申请号：EP01939337.0

申请日：2001-05-23

申请人： UNIVERSITY OF VIRGINIA PATENT FOUNDATION ,  Fraunhofer-Gesellschaft zur Förderung derangewandten Forschung e.V.

发明人： GROVES, James, F. ,  HASS, Derek ,  WADLEY, Haydn, N., G. ,  MATTAUSCH, Gösta ,  MORGNER, Henry ,  SCHILLER, Siegfried

IPC分类号： C23C14/28

CPC分类号： C23C14/228 ,  C23C14/30 ,  C23C14/32 ,  H01J37/3053 ,  H01J37/32055 ,  H01J2237/3137 ,  Y02T50/67

摘要： Plasma deposition apparatus (1) and method that allows metal or nonmetal vapor (6) to be generated by electron-beam evaporation, guides that vapor using a noble gas stream (containing reactive gases in cases of reactive evaporation), ionizes the dense directed gas and vapor stream at working pressures above about 0.0001 mbar using a hollow cathode plasma arc discharge (11), and conveys the ionized vapor and/or gas stream towards the substrate (4) for impact on the surface at energies varying from thermal levels (as low as about 0.05 eV) up to about 300 eV.

公开(公告)号：EP1029105A1

公开(公告)日：2000-08-23

申请号：EP98954899.5

申请日：1998-11-06

申请人： SANDVIK AKTIEBOLAG ,  FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DERANGEWANDTEN FORSCHUNG E.V.

发明人： SCHILLER, Siegfried ,  GOEDICKE, Klaus ,  FIETZKE, Fred ,  ZYWITZKI, Olaf ,  SJÖSTRAND, Mats ,  LJUNGBERG, Björn ,  ALFREDSSON, Viveka ,  HILDING, Thomas

IPC分类号： C23C14/08 ,  C23C14/06 ,  C23C14/35

CPC分类号： C23C14/081 ,  C23C14/352 ,  Y10T407/27 ,  Y10T428/24975 ,  Y10T428/25 ,  Y10T428/252 ,  Y10T428/265

摘要： The present invention describes a coated cutting tool for metal machining. The coating is composed of one or more layers of refractory compounds of which at least one layer consists of fine-grained, crystalline η-phase alumina, Al2O3, with a grain size less than 0.1 νm. The Al2O3-layer is deposited with a bipolar pulsed DMS technique (Dual Magnetron Sputtering) at substrate temperature in the range 450 °C to 700 °C, preferably 550 °C to 650 °C, depending on the particular material of the tool body to be coated. The alumina layer is very strongly textured in the (440)-direction. The Al2O3-layer is virtually free of cracks and halogen impurities and the Al2O3-layer gives the cutting edge of the tool an extremely smooth surface finish, which results in an improved surface finish also of the workpiece being machined. When the coated cemented carbide cutting tools are used in the machining of steel or cast iron, several important improvements compared to prior art have been observed.