Methods and apparatus for transporting and positioning micro-mechanical parts
    2.
    发明公开
    Methods and apparatus for transporting and positioning micro-mechanical parts 失效
    Verfahren undGerätzum Transportieren und Positionieren von mikromechanischen Teilen。

    公开(公告)号:EP0619253A1

    公开(公告)日:1994-10-12

    申请号:EP93112502.5

    申请日:1993-08-04

    IPC分类号: B65G51/00 B65G54/00

    摘要: Method of transporting small micro-mechanical parts, wherein a small micro-mechanical part (1) is placed on the surface (2) of a still liquid and held there on account of the surface tension, wherein a predetermined path (5) is formed and wherein the small micro-mechanical part (1) is subjected to external forces, by means of which forces the small micro-mechanical part is transported along the predetermined path (5) on the surface (2) of the liquid. Furthermore, a method of positioning a small micro-mechanical part (1), wherein a small micro-mechanical part is placed on a liquid surface and held there on account of the surface tension, wherein the geometry of the liquid surface is formed in such a manner that the small micro-mechanical part is definitively aligned in terms of its spacial orientation, and wherein means are provided by means of which the spacial position of the small micro-mechanical part can be definitively set. Apparatus for carrying out the methods of transporting and positioning and an apparatus wherein a platform is held on the surface of a liquid, is transported and positioned there, wherein within the platform a small micro-mechanical part is positioned on the surface of a liquid with respect to the platform.

    摘要翻译: 运输小型微机械部件的方法,其中小型微机械部件(1)放置在静止液体的表面(2)上并由于表面张力而保持在其上,其中形成预定的路径(5) 并且其中所述小微机械部件(1)受到外力,通过该力迫使所述小微机械部件沿着所述液体的所述表面(2)上的预定路径(5)传送。 此外,定位小型微机械部件(1)的方法,其中小的微机械部件被放置在液体表面上并且由于表面张力而保持在其上,其中液体表面的几何形状形成为 小型微机械部件在其空间取向方面明确地排列的方式,并且其中提供了能够确定地设置小型微机械部件的空间位置的装置。 用于执行运输和定位方法的装置以及其中平台被保持在液体表面上的装置被运送并定位在那里,其中在平台内,小的微机械部件位于液体的表面上, 尊重平台。