-
公开(公告)号：EP0880791B1
公开(公告)日：2002-04-17
申请号：EP96945292.9
申请日：1996-12-26
发明人： WAKALOPULOS, George
摘要： An electron beam device (10) has a cathode (34) that generates a fan-shaped electron beam. A first focusing lens (44, 46, 48, 50) includes first (48) and second (50) plates on opposed sides of a filament. The edges of the plates closest to a positively charged anode (20) are arcuate, so that as individual electrons are accelerated normal to the edge of the charged plates, the beam (60) increases in length with departure from the filament. A second focusing lens includes third (44) and fourth (46) plates on opposed sides of the first focusing lens. Each of the third and fourth plates has an arcuate edge proximate to the positively charged anode. The plates of the first and second focusing lenses provide focusing in a widthwise direction, while defining the increase in the lengthwise direction. The curvature of the plates of the first focusing lens defines a common radius with the plates of the second focusing lens.
-
公开(公告)号：EP1218916A1
公开(公告)日：2002-07-03
申请号：EP00955916.2
申请日：2000-07-06
发明人： WAKALOPULOS, George
IPC分类号： H01J33/04
CPC分类号： B29C59/16 , B29C59/14 , B29C2035/0877 , H01J33/02
摘要： One or more electron beam tubes (11) are arranged to direct electron beams (15) in air or other ambient gas toward a target object (31). The electron beams (15) ionize air producing a plasma (21) or glow discharge. An electric or magnetic field in the beam trajectory sustains the plasma (21) by trapping secondary electrons formed by collisions of beam electrons with the ambient atmosphere. Target objects (31) may be placed in the field for surface treatment, such as sterilization, or for thin film growth. In the latter case, the apparatus is enclosed in a housing (51) and a reactive gas is introduced into the beam trajectory. The gas is one which is crackable by the electron beam or plasma, such as an organic silicon compound which would liberate silicon for combination with ionized oxygen to form silicon dioxyde layers on a substrate.
-
搜索结果
2 条记录 (耗时 0.008 秒)
