公开(公告)号：EP0807955A3

公开(公告)日：2000-04-19

申请号：EP97303235.2

申请日：1997-05-13

申请人： VARIAN ASSOCIATES, INC.

发明人： Day, Derek J. ,  Majidi-Ahy, Reza ,  Fencl, Willi ,  Riem, Heinrich ,  Provencale, Salvatore ,  Staehelin, Rolf

IPC分类号： H01J47/02

CPC分类号： H01J47/028 ,  G01T1/185

摘要： The present invention provides electrode assemblies for LIC imagers that maximize ion collection and the electric field for the minimum bias voltage. To achieve this optimization the ion collection is confined to small regions. Due to this limited ion collection region, high neutralization efficiencies and fast sweep-out times can be obtained. Furthermore, with an electrode separation of approximately 0.1 millimeters, pulse voltages of less than 100 volts can be used. Low voltages result in improved reliability, longer system life, and lower safety risks.

公开(公告)号：EP0807955A2

公开(公告)日：1997-11-19

申请号：EP97303235.2

申请日：1997-05-13

申请人： VARIAN ASSOCIATES, INC.

发明人： Day, Derek J. ,  Majidi-Ahy, Reza ,  Fencl, Willi ,  Riem, Heinrich ,  Provencale, Salvatore ,  Staehelin, Rolf

IPC分类号： H01J47/02

CPC分类号： H01J47/028 ,  G01T1/185

摘要： The present invention provides electrode assemblies for LIC imagers that maximize ion collection and the electric field for the minimum bias voltage. To achieve this optimization the ion collection is confined to small regions. Due to this limited ion collection region, high neutralization efficiencies and fast sweep-out times can be obtained. Furthermore, with an electrode separation of approximately 0.1 millimeters, pulse voltages of less than 100 volts can be used. Low voltages result in improved reliability, longer system life, and lower safety risks.

摘要翻译： 本发明提供了用于LIC成像器的电极组件，其最大化离子收集以及用于最小偏置电压的电场。 为了实现这种优化，离子收集限于小区域。 由于这个有限的离子收集区域，可以获得高中和效率和快速扫出时间。 此外，通过大约0.1毫米的电极间隔，可以使用小于100伏的脉冲电压。 低电压可提高可靠性，延长系统寿命并降低安全风险。