APPARATUS FOR MAPPING OPTICAL ELEMENTS
    2.
    发明公开
    APPARATUS FOR MAPPING OPTICAL ELEMENTS 失效
    设备用于光学元件的topometric收购

    公开(公告)号:EP0765468A1

    公开(公告)日:1997-04-02

    申请号:EP95924219.0

    申请日:1995-06-13

    IPC分类号: G01B11 G01M11 G02C7

    摘要: Apparatus for mapping an optical element, the apparatus comprising a light source arranged to transmit a light beam toward the optical element, a beam separator including a plurality of beam separating elements operative to separate the light beam into a corresponding plurality of light beam portions, an optical sensing device operative to generate a light spot map including a plurality of light spots corresponding to said plurality of beam separating elements and an optical element characteristic computation device operative to derive at least one characteristic of the optical element from said light spot map and including apparatus for identifying the beam separating element corresponding to an individual spot based at least partly on information other than the location of the spot.