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公开(公告)号:EP4224999A2
公开(公告)日:2023-08-09
申请号:EP23166090.3
申请日:2019-05-17
发明人: TURNER, John , MILLER, Lawrence , SIMMONS, Jack , HANSON, Nathan
IPC分类号: H05H7/02
摘要: A system comprises a first control logic (112, 302, 304, 306, 812) configured to receive a first trigger and generate a second trigger in response to the first trigger, the second trigger having a second trigger configurable delay relative to the first trigger; a second control logic (112, 302, 304, 306, 812) configured to receive the second trigger and generate a third trigger in response to the second trigger, the third trigger having a third trigger configurable delay relative to the second trigger; a third control logic (112, 302, 304, 306, 812) configured to receive the second trigger and generate a fourth trigger in response to the second trigger, the fourth trigger having a fourth trigger configurable delay relative to the second trigger; a particle power source (106) including the second control logic (112, 302, 304, 306, 812) and configured to generate a particle power signal (118) in response to the third trigger; and a radio frequency, RF, power source (108, 808) including the third control logic (112, 302, 304, 306, 812) and configured to generate an RF power signal (120) in response to the fourth trigger.
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公开(公告)号:EP4224999A3
公开(公告)日:2023-08-16
申请号:EP23166090.3
申请日:2019-05-17
发明人: TURNER, John , MILLER, Lawrence , SIMMONS, Jack , HANSON, Nathan
IPC分类号: H05H7/02
摘要: A system comprises a first control logic (112, 302, 304, 306, 812) configured to receive a first trigger and generate a second trigger in response to the first trigger, the second trigger having a second trigger configurable delay relative to the first trigger; a second control logic (112, 302, 304, 306, 812) configured to receive the second trigger and generate a third trigger in response to the second trigger, the third trigger having a third trigger configurable delay relative to the second trigger; a third control logic (112, 302, 304, 306, 812) configured to receive the second trigger and generate a fourth trigger in response to the second trigger, the fourth trigger having a fourth trigger configurable delay relative to the second trigger; a particle power source (106) including the second control logic (112, 302, 304, 306, 812) and configured to generate a particle power signal (118) in response to the third trigger; and a radio frequency, RF, power source (108, 808) including the third control logic (112, 302, 304, 306, 812) and configured to generate an RF power signal (120) in response to the fourth trigger.
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公开(公告)号:EP4224998A1
公开(公告)日:2023-08-09
申请号:EP23166081.2
申请日:2019-05-17
发明人: TURNER, John , MILLER, Lawrence , SIMMONS, Jack , HANSON, Nathan
IPC分类号: H05H7/02
摘要: A system comprises an RF source (108, 808) configured to generate an RF signal (120); and an RF frequency control circuit (856) coupled to the RF source (108, 808) and configured to adjust a frequency of the RF signal (120); control logic (112, 302, 304, 306, 812) configured to: receive a plurality of settings over time for the RF source (108, 808); adjust the RF signal (120) in response to the settings; and adjust a setpoint of the RF frequency control circuit (856) in response to the settings.
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