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公开(公告)号：EP3811400A1
公开(公告)日：2021-04-28
申请号：EP19822301.8
申请日：2019-06-19
Applicant: Veeco Instruments Inc.
Inventor： NULMAN, Kenji , YANNUZZI, Mark , TYLER, Phillip , FIJAL, Jonathan , BREINGAN, William, Gilbert , TADDEI, John , BAVEROV, Nicholas , SWALLOW, James , ORLANDO, Christopher , VIT, Paul , HOFMEISTER, Christopher , DIGGS, Tremayne
IPC: H01L21/67
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