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公开(公告)号:EP1370877A4
公开(公告)日:2007-01-03
申请号:EP02711657
申请日:2002-02-22
申请人: WATER CORP , UNIV CURTIN TECH
摘要: A vibration measuring apparatus (10) inlcudes an accelerometer (12) which is contained within a surface micromachined integrated chip, and signal processing means including a high pass filter (14), a low pass filter (16) and an integrator (18).