公开(公告)号：EP2752085B1

公开(公告)日：2016-03-30

申请号：EP12772154.6

申请日：2012-08-30

申请人： Watlow Electric Manufacturing Company

发明人： PTASIENSKI, Kevin ,  BOLDT, Allen, Norman ,  SMITH, Janet, Lea ,  SWANSON, Cal, Thomas ,  NOSRATI, Mohammad ,  SMITH, Kevin, Robert

IPC分类号： H05B1/02 ,  H05B3/26 ,  H01L21/67 ,  H05B1/00 ,  H01L21/683

CPC分类号： H01L21/67103 ,  H01L21/67098 ,  H01L21/67109 ,  H01L21/67248 ,  H01L21/6833 ,  H05B1/00 ,  H05B1/02 ,  H05B1/0202 ,  H05B1/0227 ,  H05B1/0233 ,  H05B3/02 ,  H05B3/06 ,  H05B3/20 ,  H05B2203/005 ,  H05B2203/013 ,  H05B2213/03 ,  Y10T156/10

公开(公告)号：EP2752085A1

公开(公告)日：2014-07-09

申请号：EP12772154.6

申请日：2012-08-30

申请人： Watlow Electric Manufacturing Company

发明人： PTASIENSKI, Kevin ,  BOLDT, Allen, Norman ,  SMITH, Janet, Lea ,  SWANSON, Cal, Thomas ,  NOSRATI, Mohammad ,  SMITH, Kevin, Robert

IPC分类号： H05B3/26 ,  H01L21/67 ,  H05B1/02

CPC分类号： H01L21/67103 ,  H01L21/67098 ,  H01L21/67109 ,  H01L21/67248 ,  H01L21/6833 ,  H05B1/00 ,  H05B1/02 ,  H05B1/0202 ,  H05B1/0227 ,  H05B1/0233 ,  H05B3/02 ,  H05B3/06 ,  H05B3/20 ,  H05B2203/005 ,  H05B2203/013 ,  H05B2213/03 ,  Y10T156/10

摘要： Methods of manufacturing a heater are provided that generally include forming a laminate having a dielectric layer, a first double-sided adhesive dielectric layer, and a conductive layer. Next, a circuit pattern is created into the conductive layer, and then the circuit pattern is covered with a second double-sided adhesive dielectric layer. The second double-sided adhesive dielectric layer is covered with a sacrificial layer, and then the heater is formed, the heater comprising the dielectric layer, the first double-sided adhesive dielectric layer, the conductive layer, and the second double-sided adhesive dielectric layer. Subsequently, the sacrificial layer is removed.