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    Vacuum evaporation system
    1.
    发明公开
    Vacuum evaporation system 失效
    VAKUUM-Aufdampfvorrichtung。

    公开(公告)号：EP0489443A1

    公开(公告)日：1992-06-10

    申请号：EP91120971.6

    申请日：1991-12-06

    申请人： XEROX CORPORATION

    发明人： Melnyk, Andrew R. ,  Swales, Michael G. ,  Teney, Donald

    IPC分类号： C23C14/24 ,  C23C14/26

    CPC分类号： C23C14/246 ,  C23C14/243 ,  C23C14/26

    摘要： A vacuum evaporation container includinging a resistively heatable cylindrical crucible having at least one open end and having an axially aligned slot and a hollow cylindrical insert concentrically located within the cylindrical crucible, the insert having a slot aligned with the slot of the crucible, closed ends and an electrical conductivity less than the electrical conductivity of the electrically conductive cylindrical crucible. This vacuum evaporation container is employed in a vacuum deposition process.

    摘要翻译： 一种真空蒸发容器，其包括具有至少一个开口端并且具有轴向对准的槽和同心地位于所述圆柱形坩埚内的中空圆柱形插入件的电阻可加热的圆柱形坩埚，所述插入件具有与所述坩埚的狭槽对准的狭槽，封闭端和 电导率小于导电圆柱形坩埚的导电率。 该真空蒸发容器用于真空沉积工艺。