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公开(公告)号:EP3998130A1
公开(公告)日:2022-05-18
申请号:EP19943196.6
申请日:2019-08-29
发明人: KINTOKI, Tomohiro , ITO, Tetsuya , MORI, Yuki , MYOREN, Yuki
摘要: A jaw exchanger includes: a stocker in which a jaw attachable to a chuck body rotatable about a rotation axis is storable; a stocker movement mechanism configured to move the stocker between a first position and a second position; and a jaw transferor. The jaw transferor is configured to transfer the jaw to the stocker provided at the first position from a jaw receiver configured to receive the jaw. The jaw transferor is also configured to transfer the jaw to the chuck body from the stocker provided at the second position.