公开(公告)号：EP2871474A1

公开(公告)日：2015-05-13

申请号：EP13192079.5

申请日：2013-11-08

申请人： pro.micron GmbH & Co.KG

发明人： Helbig, Christian ,  Plessky, Viktor

IPC分类号： G01N29/02 ,  G01N29/12 ,  G01N29/24 ,  H01L41/113 ,  H03H9/25

CPC分类号： G01N29/022 ,  G01N29/12 ,  G01N29/2462 ,  G01N29/2468 ,  G01N2291/0423 ,  H03H9/02685 ,  H03H9/0285

摘要： A Surface Acoustic Wave (SAW) sensor comprising a substrate with a surface suitable for propagation of SAW in a first direction and with a surface acoustic wave transducer (10) situated on said surface and responsive to an interrogation signal for generating propagating surface acoustic waves in said first direction is disclosed. According to the invention such SAW sensor is characterized in that at least one Fabry-Perot-type resonator (12) is situated in an acoustic channel of said transducer at a distance D 0 = V SAW ⋅ T init 2 providing a chosen initial delay T init . V SAW is the velocity of SAW propagation on a free surface in said first direction and the Fabry-Perot-type resonator (12) at least partly overlaps with said acoustic channel. The resonator (12) is excited by a SAW pulse generated by the transducer (10) with duration sufficient for accumulation of SAW energy in the resonator (12) and the resonator (12) response is delayed so that amplitudes of environmental echoes decrease to an acceptable, non-disturbing level. After that a receiver of a reader device receives the response of the resonator (12). This response may contain information about temperature, deformation or other physical influences on the resonator. Different sensors in one arrangement may be identifiable by different initial delays and/or different frequencies of the resonators and may be interrogated by one common reader. The sensor combines the advantages of the SAW resonator sensors and SAW delay line sensors.

摘要翻译： 一种表面声波（SAW）传感器，包括具有适于在第一方向上传播SAW的表面的衬底和位于所述表面上的表面声波换能器（10），并响应于询问信号，以产生传播表面声波 所述第一方向被公开。 根据本发明，这种SAW传感器的特征在于，至少一个法布里 - 珀罗型谐振器（12）位于所述换能器的声通道中，距离D 0 = V SAW