GASENTNAHMESONDE UND VERFAHREN ZUM BETREIBEN EINER GASENTNAHMESONDE
    5.
    发明公开
    GASENTNAHMESONDE UND VERFAHREN ZUM BETREIBEN EINER GASENTNAHMESONDE 审中-公开
    取样探头及其操作方法抽气PROBE

    公开(公告)号:EP3036519A1

    公开(公告)日:2016-06-29

    申请号:EP14747840.8

    申请日:2014-07-31

    IPC分类号: G01N1/22

    摘要: The invention relates to a method for operating a gas-sampling probe (1), wherein a gas to be analyzed is removed from a process chamber (17) in the region of a front end (1a) of a gas-sampling tube (2) and is conducted in the gas-sampling tube up to a rear end (1b) while being cooled at the same time, in that cooling air (14) is conducted between the gas-sampling tube and at least one outer jacket (3) surrounding the gas-sampling tube, wherein the cooling air is supplied and discharged at the rear end of the gas-sampling tube and the temperature of the gas to be analyzed in the region of the front end of the gas-sampling tube is higher than the temperature of the supplied cooling air, and the gas-sampling tube radiates outwardly, wherein the temperature of the supplied cooling air is higher than the temperature of the discharged cooling air.