摘要:
Provided are an orifice member, and a differential-pressure flow meter and a flow-regulating device using the orifice member, that allow purging to be carried out easily when changing the fluid to be circulated, that are less likely to cause contamination and leaching of impurities to the circulated fluid, and that can be easily produced. The flow-regulating device includes a first pressure-measuring device (object to be connected to) that is connected to one end of the orifice member, and a second pressure-measuring device (object to be connected to) that is connected to the other end of the orifice member, and a flow-regulating valve that is connected to the downstream side of the differential-pressure flow meter, which includes the above-mentioned units. In the orifice member, a tube portion, one end of which is connected to the first pressure-measuring device and other end of which is connected to the second pressure-measuring device and whose internal part forms a channel connecting the first and second pressure-measuring devices, and an orifice provided inside the tube portion are integrated.
摘要:
Provided is a fluid device unit structure in which a chemical solution stagnation portion that is formed between a valve of a main fluid flow path and a branching point of a return flow path is minimized to cause hardly any solidification of a chemical solution. In the fluid device unit structure in which a plurality of fluid devices that are connected via flow paths are integrated on a base member (10) to form a single unit, and the main fluid flow path (11) and the return flow path (12) formed in the base member (10) are respectively provided with a first valve (20) and a second valve (40) for switching the flow paths, the branching inlet (12a) at which the return flow path (12) branches from the main fluid flow path (11) is close to the upstream side of the first valve (20).
摘要:
A pressure sensor (10) is provided, which includes a pressure detector (20) that has a pressure receiving surface (15) in contact with a liquid, and detects a pressure of the liquid to a pressure receiving section (16) included in the pressure receiving surface (15), and a housing (14) having a housing inner wall (19) that demarcates a liquid chamber (11) together with the pressure receiving surface (15), wherein the housing inner wall (19) is provided with an inflow hole that causes the liquid to flow into the liquid chamber (11), and an outflow hole that causes the liquid to flow out of the liquid chamber (11), at least a part of a connecting portion, which is connected to the pressure receiving surface (15), of the housing inner wall (19) is formed as an inner wall of the outflow hole, and the housing inner wall (19) at the portion formed as the inner wall of the outflow hole protrudes more outward of the liquid chamber (11) than the other connecting portion adjacent to the portion formed as the inner wall of the outflow hole.
摘要:
A pressure sensor having a structure in which compressible fluid is prevented from stagnating in the vicinity of a pressure-receiving surface of the pressure sensor in the interior of a pressure introducing portion is provided. In a pressure sensor 21B including a sensor body 23 arranged in a pressure introduction flow channel 22A branched in a T-shape upward from a primary fluid flow channel 12 in which fluid to be subjected to pressure measurement flows, the pressure introduction flow channel 22A includes an inclined surface 28 extending in a direction to increase an opening area on the side of an inlet port of the fluid on a wall surface on the downstream side in terms of the direction of flow of the fluid.
摘要:
There is provided a valve body capable of preventing a seat part from being deformed by a stress caused by nonuniform tightening, and completely closing a valve in a closed state, and a valve having the valve body. The body of the valve made from a resin material, comprises an internal port and an external port provided on the outside of the internal port. A seat part is provided on one end portion of the internal port and abutting with a tip portion of a valve element. The body is characterized in that the external port is provided on the radial outside of the seat part around substantially the whole circumference.