MULTI-AXIS NANOPOSITIONER FLEXURE STAGE WITH COARSE AND FINE ADJUSTMENT

    公开(公告)号:EP4425783A1

    公开(公告)日:2024-09-04

    申请号:EP24156379.0

    申请日:2024-02-07

    申请人: Thorlabs Inc.

    IPC分类号: H02N2/04 H02N2/02 G12B5/00

    CPC分类号: H02N2/028 H02N2/043 G12B5/00

    摘要: A multi-axis positioner including: a base; a platform; and an arrangement of a plurality of actuators mounted onto the base; wherein the arrangement of the plurality of actuators are coupled to the platform via a plurality of monolithic flexures such that the arrangement of the plurality of actuators moves the platform relative to the base in a plurality of axes of motion; wherein each of the plurality of actuators includes a coarse travel actuation mechanism coupled directly with a fine travel actuation mechanism in a corresponding axis of motion of the arrangement of the plurality of actuators; wherein the fine travel actuation mechanism has a higher travel resolution than that of the coarse travel actuation mechanism.

    MULTIPLE CHANNEL MATCHING METHOD
    10.
    发明公开
    MULTIPLE CHANNEL MATCHING METHOD 审中-公开
    MEHRKANALIGES ABGLEICHSVERFAHREN

    公开(公告)号:EP3063874A4

    公开(公告)日:2017-06-14

    申请号:EP14857523

    申请日:2014-10-22

    申请人: THORLABS INC

    发明人: GOSSAGE KIRK

    IPC分类号: H04N5/365 H04N5/372 H04N5/378

    摘要: A method for matching one or more channels to a reference channel in a multiple-channel detector having a digital output, the method including: receiving an analog-to-digital unit (ADU) input value from the multiple-channel detector for each channel; and replacing the ADU input value by an output value corresponding to each channel from a look up table (LUT); wherein the LUT is created by taking a relative intensity ratio of signals from each channel compared to the reference channel over a range of voltage values; calculating a signal value on the detector that generates a specific ADU value across the entire ADU range of the detector; interpolating the relative intensity ratios to obtain ratios corresponding to the calculated signal values for each channel; and dividing the each of the specific ADU value by the corresponding interpolated ratio to obtain the corresponding output value for each channel.

    摘要翻译: 一种用于在具有数字输出的多通道检测器中将一个或多个通道与参考通道进行匹配的方法,所述方法包括:从每个通道的多通道检测器接收模数单元(ADU)输入值; 并从查找表(LUT)中用对应于每个频道的输出值替换ADU输入值; 其中所述LUT通过在一定范围的电压值上获取来自每个通道的信号相对于所述参考通道的相对强度比来创建; 计算检测器上的信号值,其在检测器的整个ADU范围上生成特定的ADU值; 内插相对强度比以获得对应于每个通道的计算信号值的比率; 并将每个特定的ADU值除以相应的插值比率以获得每个通道的对应输出值。