MULTI-AXIS NANOPOSITIONER FLEXURE STAGE WITH COARSE AND FINE ADJUSTMENT

    公开(公告)号:EP4425783A1

    公开(公告)日:2024-09-04

    申请号:EP24156379.0

    申请日:2024-02-07

    Applicant: Thorlabs Inc.

    CPC classification number: H02N2/028 H02N2/043 G12B5/00

    Abstract: A multi-axis positioner including: a base; a platform; and an arrangement of a plurality of actuators mounted onto the base; wherein the arrangement of the plurality of actuators are coupled to the platform via a plurality of monolithic flexures such that the arrangement of the plurality of actuators moves the platform relative to the base in a plurality of axes of motion; wherein each of the plurality of actuators includes a coarse travel actuation mechanism coupled directly with a fine travel actuation mechanism in a corresponding axis of motion of the arrangement of the plurality of actuators; wherein the fine travel actuation mechanism has a higher travel resolution than that of the coarse travel actuation mechanism.

    SHOCK RESISTANT DRIVE UNIT
    5.
    发明公开

    公开(公告)号:EP4311097A1

    公开(公告)日:2024-01-24

    申请号:EP22186399.6

    申请日:2022-07-22

    Applicant: MINISWYS SA

    Abstract: A drive unit for driving a passive element (4) relative to an active element (1), comprises a resonator (2) and an excitation means (23), and two arms (21, 22) with contact elements (31, 32) that are movable by way of oscillating movements and thereby drive the passive element (4).
    The resonator (2) is attached to a base element (5) by means of fixation elements (29). For at least a first arm (21) and for its contact element (31, 32) there is a shortest path through the active element 1 to a nearest fixation element (29). The shortest path does not intersect an outline of the excitation means (23), or, of it does, the area of an overhanging portion of the excitation means (23) is less than ten percent of an area of the excitation means (23).
    As a result, the excitation means are less likely to break due to forces on the arms.

    OSCILLATING DRIVE ELEMENT AND DRIVE UNIT
    8.
    发明公开

    公开(公告)号:EP4075661A1

    公开(公告)日:2022-10-19

    申请号:EP21202378.2

    申请日:2021-10-13

    Applicant: MINISWYS SA

    Abstract: A drive element serves for driving a passive element (4) relative to an active element (1). The active element (1) comprises a resonator (2) and an oscillating excitation means (23), and at least one arm (21) extending in an arm direction (21a) and comprising, at an outer end, a contact element (31) that is movable by way of oscillating movements of the arm (21), for driving the passive element (4). The arm (21) comprises, at its outer end, a protrusion (33) extending in a first direction relative to the arm direction (21a), on a first side of the arm direction. The arm's contact element (31) extends in a second direction relative to the arm direction (21a), on a second side of the arm direction, opposite to the first side .

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