摘要:
A sensor comprises a semiconductor pellet (10) having member (11) which receives the action of a force, a stationary member (13) fixed to the sensor body and a flexible portion (12) formed between the two members (11) and (13); a member (20) for transmitting the force to the member (11); and detection means (60-63) which convert the mechanical deformation of a distortion-producing member due to the transmitted force into an electric signal in order to detect the force acting on the member (20) as an electric signal. This sensor is combined with a signal processor, which comprises analog multipliers (101-109) and analog adder/substracters (111-113), and has a function for cancelling the interference in the different directions in which the forces are exerted. In the sensor are provided two portions (E3, E4-E8) that are located at opposing positions and that produce displacement between them due to the action of a force. The sensor is tested by applying the coulomb force between the two. Further, seats (21, 22) are provided to surround the action member (20). A predetermined gap is formed between the member (20) and the seats, and the displacement of the member (20) is limited within a predetermined range that corresponds to the gap. The member (20) and the seats are obtained by cutting the same common substrate (350, 350').
摘要:
A power generating element according to the present invention includes a pedestal formed in a frame shape in plan view, a vibrating body provided inside the pedestal, at least three first bridge supporting portions, each of the first bridge supporting portions extending along a first extending axis and configured to arrange the vibrating body to be supported on a pedestal, and a charge generating element. The first extending axes of a pair of the first bridge supporting portions adjacent to each other form a predetermined angle in a circumferential direction with the vibrating body defined as a center in plan view. At least one first electrode layer of the charge generating element is arranged on each of the first bridge supporting portions.
摘要:
An efficient rotational-operation-quantity input device suitable to be built into a small electrical appliance is provided. An operational force applied by an operator is input in time series as a coordinate value (x, y) in an XY two-dimensional rectangular coordinate system by a two-dimensional force sensor (100), and is converted into a coordinate value (r, θ) by a polar-coordinate converting section (200). When a value r of the coordinate value (r, θ) obtained in time series is larger than a predetermined threshold rt, an operation-quantity recognizing section (300) recognizes the coordinate value (r, θ) as a significant coordinate value, and, when the value θ generates a variation Δθ exceeding a predetermined threshold θt with respect to a value "θ before" immediately therebefore during a period during which a significant coordinate value (r, θ) is obtained continuously, it recognizes a value corresponding to the variation Δ θ as an operation quantity indicating a rotation.
摘要:
An angular velocity sensor for detecting angular velocity components about three axes with high response is provided. A weight body (40) carries out a circular movement along a circular orbit (41) within the XY-plane with the origin O being as a center. The weight body (40) is supported so that it can be moved with a predetermined degree of freedom within a sensor casing. A Coriolis force Fco exerted in the Z-axis direction to the weight body (40) is detected when the weight body (40) passes through the X-axis at the point Px and an angular velocity ωx about the X-axis is obtained based on the detected force. Further, a Coriolis force Fco exerted in the Z-axis direction to the weight body (40) is detected when the weight body (40) passes through the Y-axis at the point Py and an angular velocity ωy about the Y-axis is obtained based on the detected force. In addition, a force exerted in the X-axis direction to the weight body (40) at the point Px is detected and an angular velocity ωz about the Z-axis is obtained based on the detected force by eliminating a centrifugal force.
摘要:
Upper electrodes (A1 to A5) are disposed on an upper surface of a disk-shaped piezoelectric element (10). On a lower surface of the piezoelectric element (10), an annular groove to surround origin O is formed at position corresponding to the upper electrodes (A1 to A5). At the portion where the annular groove is formed, the piezoelectric element (10) includes a flexible portion formed so as to have thin thickness. When the peripheral portion of the piezoelectric element (10) is fixed to the casing, the central portion positioned within the annular groove functions as a weight caused to hang down from the flexible portion. On the lower surface of the piezoelectric element (10), a lower electrode (B) is formed. When force is applied to the weight by acceleration, the flexible portion is bent. As a result, predetermined charges are produced in the upper electrodes (A1 to A5) with the lower electrode (B) being as a reference potential. Accordingly, applied acceleration can be detected. When a predetermined a.c. signal is delivered between the lower electrode (B) and the upper electrodes (A1 to A5), the weight is oscillated in a predetermined direction. Accordingly, angular velocity can be detected on the basis of Coriolis force applied to the weight. Thus, simple sensor capable of detecting both acceleration and angular velocity in three dimensional directions can be realized.
摘要:
This invention discloses an application technique of a basic sensor for detecting force which comprises a transducer (10) for converting mechanical deformation to an electrical signal, and a first strain generation member (20) having a support portion (21) and a working portion (23) and connected to the transducer in such a manner as to generate mechanical deformation in the transducer on the basis of the displacement of the working portion with respect to the support portion. Furthermore, a force detection apparatus applicable to various measurement ranges can be accomplished by adding a second strain generation member (30), which has a fixed portion (31) fixed to the support portion of the first strain generation member in at least the direction of the force to be detected and a displacing portion (33) connected to the working portion of the first strain generation member, generates displacement on the basis of a given external force and transmits the resultant displacement to the working portion of the first strain generation member. A detection apparatus suitable for measurement of either of force and moment can be accomplished by elongating the displacing portion. The invention further discloses the embodiment wherein a stylus (306) is connected to the basic sensor to apply the invention to a contact detection apparatus and the embodiment wherein the basic sensor is fitted to the hand of a robot for use as a robot gripper.