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公开(公告)号:EP4379243A3
公开(公告)日:2024-08-14
申请号:EP24170192.9
申请日:2018-12-12
申请人: SMC Corporation
摘要: [Object] To connect a valve plate with respect to a valve rod so as to be removable in a direction of an axis of the valve rod and to firmly fix the valve plate so as not to undergo relative rotation.
[Solution] When a part of a hole rear wall 13b of a mounting hole 13 formed in a valve plate 3 and a part of a rod rear wall 14b of a mounting portion 14 of a valve rod 4 have formed thereat inclined portions 13b1 and 14b1, respectively, that produce a wedge effect by abutting upon each other and when the valve plate 3 and the valve rod 4 are fixed in a direction of an axis L by a valve-plate fixing screw 17, a wedge effect when the inclined portions 13b1 and 14b1 abut upon each other causes a rod front wall 14a of the mounting portion 14 and a hole front wall 13a of the mounting hole 13 to come into close contact with each other and the valve plate 3 and the valve rod 4 to be precisely and firmly fixed to each other so as not to rotate relative to each other.-
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公开(公告)号:EP4027043B1
公开(公告)日:2023-10-18
申请号:EP21217523.6
申请日:2021-12-23
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公开(公告)号:EP3443583B1
公开(公告)日:2023-08-09
申请号:EP17782918.1
申请日:2017-04-10
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公开(公告)号:EP4131331A1
公开(公告)日:2023-02-08
申请号:EP22195361.5
申请日:2017-01-12
发明人: HILL, Gordon , BENEDICT, Scott , WENZEL, Kevin
摘要: A vacuum pumping line plasma source is provided. The plasma source includes a body defining a generally cylindrical interior volume extending along a central longitudinal axis. The body has an input port for coupling to an input pumping line, an output port for coupling to an output pumping line, and an interior surface disposed about the generally cylindrical interior volume. The plasma source also includes a supply electrode disposed adjacent to a return electrode, and a barrier dielectric member, a least a portion of which is positioned between the supply electrode and the return electrode. The plasma source further includes a dielectric barrier discharge structure formed from the supply electrode, the return electrode, and the barrier dielectric member. The dielectric barrier discharge structure is adapted to generate a plasma in the generally cylindrical interior volume.
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公开(公告)号:EP4111080A1
公开(公告)日:2023-01-04
申请号:EP21700596.6
申请日:2021-01-19
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公开(公告)号:EP3940269A1
公开(公告)日:2022-01-19
申请号:EP20191079.1
申请日:2020-08-14
发明人: LIN, CHENG-CHIMR
摘要: A gate valve (10) with a locking function, includes: a housing (11) having a first plate (12) and a second plate (14), the first plate (12) and the second plate (14) having each a valve opening (121, 141) penetrating therethrough respectively; a driving unit (21); a sliding seat (31) having a plurality of sliding abutment members (34); a valve member (41) having two cranks (42) swingably arranged on the sliding seat (31); the two cranks (42) configured to form a parallel equal crank mechanism jointly with the sliding seat (31) and the valve member (41); and an elastic element (51); wherein when the sliding seat (31) is at the highest position, the two cranks (42) make a slanted shape; when the sliding seat (31) is at the lowest position, the two cranks (42) make a horizontal shape relatively to the housing (11), the sliding seat (31) and a plurality of sliding abutment members (44) of the valve member (41) abut against the bottom portion (111) of the housing (11), the valve member (41) swings relative to the sliding seat (31) to allow the valve member (41) to seal a position of the valve opening (141) of the second plate (14), and the plurality of sliding abutment members (34) on the sliding seat (31) also roll on the inner side of the first plate (12).
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公开(公告)号:EP3420259B1
公开(公告)日:2021-03-03
申请号:EP17724226.0
申请日:2017-05-08
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公开(公告)号:EP3286465B1
公开(公告)日:2020-04-01
申请号:EP16723859.1
申请日:2016-04-22
申请人: General Plasma, Inc.
发明人: MADOCKS, John E.
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公开(公告)号:EP2860438B1
公开(公告)日:2019-12-18
申请号:EP13813496.0
申请日:2013-07-01
申请人: TLV Co., Ltd.
发明人: OIKE Tadashi
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