摘要:
A micro-electromechanical unit (100) is provided. The micro-electromechanical unit (100) comprises a diaphragm (10) having a planar extension. The diaphragm (10) comprises a semiconductor structure (20) comprising a first (22) and a second (24) layer, each layer extending in the planar extension. The first layer (22) comprises AI(1-x)Ga(x)N, wherein 0.2 ≤ x ≤ 0.4, and the second layer (24) comprises GaN. The micro-electromechanical unit (214) further comprises a support structure (30) supporting the diaphragm (10), and an electrode arranged (50) on a surface of the diaphragm (10). Also, a loudspeaker device (200) and a microphone device (300) comprising the micro-electromechanical unit (100) are disclosed.
摘要:
The invention relates to a dynamic loudspeaker driver (42) which comprises a magnet-system (42), a membrane and a voice coil (45). The membrane comprises a semi-rigid diaphragm (43) and a flexible annulus (44) surrounding the diaphragm (43). The diaphragm (43) is movably mounted with respect to the magnet-system (42) by means of the annulus (44) and comprises a substrate (50) which comprises a first surface (51) and a second surface (52) being opposite to the first surface (51), a first layer (61) attached to and continuously covering the first surface (51), and a second layer (62) attached to and covering the second surface (52). The second layer (62) comprises a plurality of holes (63) having a predefined pattern. The voice coil (45) is attached to the diaphragm (43) and is operatively coupled with the magnet-system (42).