Abstract:
PROBLEM TO BE SOLVED: To provide a chemical mechanical polishing water-based dispersing composition capable of keeping in-plane uniformity of polishing speed and inhibiting variation in in-plane flatness of a polished surface during a process of chemical-mechanical-polishing a barrier metal layer provided on a substrate for use of a display device, a manufacturing method of the chemical mechanical polishing water-based dispersing composition, and a chemical mechanical polishing method using the dispersing composition. SOLUTION: The inventors have found that the problem can be solved by means of the chemical mechanical polishing water-based dispersing composition for polishing the barrier metal layer provided on the substrate for use of the display device, which contains (A) abrasive grains, (B) an organic acid and (C) one or more atoms selected from a group consisting of Ta, Ti and Ru, wherein a ratio Rmax/Rmin of a longer diameter Rmax and a shorter diameter of the (A) abrasive grain ranges from 1.0 to 1.5 and (C) element ranges from 1.0×10 2 to 1.0×10 4 ppm. COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide an electrode mechanism in a dielectric material film capacitor which assures close contact between a lower electrode and a layer under the lower electrode and is not easily oxidized and thermally stable. SOLUTION: The dielectric material film capacitor 20 comprises a lower electrode 22 in the thickness of 10 to 100 nm formed of a material including platinum, a dielectric material film 24 formed on the upper part of the lower electrode 22 and including an oxide having the type ABOx peroviskite structure, and an upper electrode 26 provided on the upper part of the dielectric material film 24. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a method for producing perovskite-type crystal particles each having an ABOx-type crystal structure, which enables significant improvement in the productivity by realizing lowering of the process temperature, and allowing the treatment time to be shortened when a dielectric film having the ABOx-type crystal structure is formed, and to provide a method for producing a dispersion containing the perovskite-type crystal particles. SOLUTION: The method for producing the perovskite-type crystal particles is a method for producing crystal particles having the ABOx-type crystal structure, which includes following processes (a) and (b). The process (a) comprises preparing a solution by dissolving a metal hydroxide containing at least one kind of metal A selected from Li, Na, Ca, Sr and Ba, and at lest one of a metal alkoxide and a metal complex, containing at least one kind of metal B selected from Ti, Zr, Hf, Ta and Nb into an organic solvent. The process (b) comprises obtaining crystal particles by adding water to the solution prepared in the process (a) so as to hydrolyze/condense precursors in the solution. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
A composition for film formation and a film obtained by heating the composition. The composition comprises: (A) a hydrolyzate and/or partial condensate of a compound represented by the following formula (1) R nSi(OR )4-n wherein R and R may be the same or different and each represent an alkyl group having 1 to 5 carbon atoms or an aryl group having 6 to 20 carbon atoms, and n is an integer of 1 or 2; (B) a metal chelate compound represented by the following formula (2) R tM(OR )s-t wherein R represents a cheating agent, M represents a metal atom, R represents an alkyl group having 2 to 5 carbon atoms or an aryl group having 6 to 20 carbon atoms, s represents a valence of the metal M, and t is an integer of 1 to s; (C) an organic solvent having a boiling point of 110 to 180 DEG C; and (D) beta -diketone.