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公开(公告)号:JPS6355075B2
公开(公告)日:1988-11-01
申请号:JP3182181
申请日:1981-03-04
Applicant: MATSUSHITA ELECTRIC IND CO LTD
Inventor: UEDA SHIGEKI
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公开(公告)号:JPS61279092A
公开(公告)日:1986-12-09
申请号:JP12082485
申请日:1985-06-03
Applicant: MATSUOKA MITSUHISA
Inventor: MATSUOKA MITSUTOSHI
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公开(公告)号:JPS6115511Y2
公开(公告)日:1986-05-14
申请号:JP3354583
申请日:1983-03-10
IPC: H01L21/26 , F27B3/08 , F27D11/00 , F27D11/02 , H01L21/205 , H01L21/22 , H01L21/265 , H01L21/31 , H05B6/00
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