公开(公告)号：JPS5418073A

公开(公告)日：1979-02-09

申请号：JP8241677

申请日：1977-07-08

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： YASUDA KENICHI

IPC: G01R31/327 ,  G01R31/333

公开(公告)号：JPH09153595A

公开(公告)日：1997-06-10

申请号：JP31241095

申请日：1995-11-30

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： KONO TAKASHI ,  ASAKURA MIKIO ,  HIDAKA HIDETO ,  YASUDA KENICHI

IPC: H01L21/82 ,  H01L21/02 ,  H01L21/8242 ,  H01L23/525 ,  H01L27/108 ,  H01S3/00

Abstract: PROBLEM TO BE SOLVED: To form a hole for fuse disconnection without adding a process of forming a protection film, etc., while protecting the fuse part. SOLUTION: A step part formed on an interlayer insulating film on the cell plate 129 on tube type capacitors 125a and 125b is removed by selectively removing the interlayer insulating film by etching, and at the same time, a recessed part 141 is formed on a fuse part 130. Since etching is completed before exposing the cell plate 129, the recessed part 141 is formed on the fuse part 130 without exposing the fuse part 130.

公开(公告)号：JPH02186688A

公开(公告)日：1990-07-20

申请号：JP476789

申请日：1989-01-13

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： WAKATA HITOSHI ,  YASUDA KENICHI

IPC: H01S3/137

Abstract: PURPOSE:To control a fine adjustment etalon and a coarse adjustment spectral means very precisely by a method wherein a free spectral region is so set as to enable an interference fringe of side band wavelength to appear close to the interference fringe which is corresponding to a central wavelength. CONSTITUTION:A fine adjustment etalon 5 and a coarse adjustment special means 4 are inserted in an optical resonator, and a wavelength monitoring mechanism 10 including a monitor etalon which generates wavelength information, and a coarse adjustment control section 20 and a fine adjustment control section 30 which control the fine adjustment etalon 5 and the coarse adjustment spectral means 4 respectively basing on the wavelength information are provided. Here, provided that an integer corresponding to a side band wavelength possible to occur on both sides of a center wavelength is i, a constant R which represents the relation between a free spectral region FSR2 of the fine adjustment etalon 5 and a free special region FSRM is expressed by a formula, R=iXFSR2+jXFSRM, where j denotes an integer which makes the absolute value of R minimum, when FSR2 and FSRM are so set as to satisfy formulas, R 0 and R FSRM, the interference fringe of a side band wavelength appears close to the interference fringe which corresponds to a center wavelength. By this setup, the fine adjustment etalon 5 and the coarse spectral means 4 can be precisely controlled basing on the fluctuation of the center wavelength and the generation state of the side band respectively.

公开(公告)号：JPH01184890A

公开(公告)日：1989-07-24

申请号：JP612788

申请日：1988-01-13

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： NAKATANI HAJIME ,  YASUDA KENICHI ,  MINOWA YOSHIFUMI

IPC: B23K26/00 ,  H01S3/137

Abstract: PURPOSE:To obtain laser oscillation with stable wavelength even just after restarting oscillation, by controlling an etalon by means of a signal from a wavelength monitoring mechanism during laser oscillation, and predictively controlling it according to characteristics of the etalon after stopping the laser. CONSTITUTION:During laser oscillation a laser beam is spectrally diffracted by a wavelength monitoring mechanism and a servo mechanism 10 is driven by a controlling mechanism 8 to control a Fabry-Perot etalon 4. Upon stopping of the oscillation, a quantity of state A0 of the etalon 4 at that moment is recorded. Time (t) elapsed after the stopping is counted and a quantity of sate A(t) is calculated according to a predetermined formula. The servo mechanism 10 is driven on a result of the calculation to control the etalon 4.

公开(公告)号：JPH01184889A

公开(公告)日：1989-07-24

申请号：JP612688

申请日：1988-01-13

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： YASUDA KENICHI ,  NAKATANI HAJIME ,  KANEKO HIROMI

IPC: B23K26/00 ,  H01S3/137 ,  H01S3/225

Abstract: PURPOSE:To stabilize wavelength while decreasing variation in laser output, by controlling one of etalons from a result of spectral diffraction of a laser beam and controlling the other etalon from laser power. CONSTITUTION:A wavelength monitoring mechanism 7 spectrally diffracts a laser beam and a controlling mechanism 8 drives a servo mechanism 10 on a result of the spectral diffraction to control a fine control etalon 5. A voltage applied to a laser medium 1 is divided by an applied voltage generating mechanism 9. The partial voltage is measured by the controlling mechanism 8 and it is determined how to control a rough control etalon 4. The central wavelength of the rough control etalon 4 is regulated according to the determination by a servo mechanism 11. When laser oscillation is started, an output voltage is measured and recorded to be compared with the prior result of measurement. The rough control etalon 4 is regulated by the servo mechanism 11 from a result of the comparison.

公开(公告)号：JPH01183873A

公开(公告)日：1989-07-21

申请号：JP904388

申请日：1988-01-18

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： YASUDA KENICHI ,  NAKATANI HAJIME ,  KANEKO HIROMI

IPC: B23K26/00 ,  H01S3/00 ,  H01S3/137 ,  H01S3/225

Abstract: PURPOSE:To stabilize a wavelength and the output of a laser, by controlling one etalon based on the result of the spectroscopic processing of a laser beam, and controlling a voltage, which is applied to a laser medium and another etalon in a time division mode based on the output of the laser. CONSTITUTION:Two etalons, which are a fine adjustment etalon 5 and a coarse adjustment etalon 4, are provided, and a wavelength is selected. A laser beam 6, which is taken out of a laser oscillator, is guided to a wavelength monitor mechanism 7, and the oscillating wavelength is measured. Servo-mechanisms 10 and 11 drives the fine adjustment etalon 5 and changes the wavelength. The output of the laser is measured with a power monitor mechanism 9 based on the laser beam 6. A voltage, which is applied to a laser medium, and the coarse adjustment etalon 4 are controlled in a time division mode. Thus, the output of the laser becomes constant. In this way, the deviation of the wavelength is measured and an arbitrary wavelength is fixed. The decrease in output when the wavelength is deviated can be suppressed.

公开(公告)号：JPS6466762A

公开(公告)日：1989-03-13

申请号：JP22500687

申请日：1987-09-08

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： YASUDA KENICHI

IPC: G06F12/16 ,  G11C29/00

Abstract: PURPOSE:To maintain the functions for necessary storage and input/output even though a data register and its related parts have defects, by performing the prescribed nonreversible switch processing to switch the data register to a spare data register. CONSTITUTION:A dual port RAM contains a spare data register 1d in addition to the regular data registers 1a-1c which are set in parallel and in response to the columns included in a memory cell array of a RAM part. The register 1d contains a pair of bit lines 7d, a spare sense amplifier 8d, a transfer gate 2, a special serial gate 6d. Then the register 1d is replaced with either defective one of the regular registers 1a-1c.

公开(公告)号：JPS63288430A

公开(公告)日：1988-11-25

申请号：JP12243887

申请日：1987-05-21

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： YASUDA KENICHI

IPC: G11B7/09

Abstract: PURPOSE:To obtain an accurate track deviation detection signal by correcting the track deviation detection signal due to a first light receiving part for track deviation detection by the medium inclination detection signal due to a second light receiving part. CONSTITUTION:First light receiving parts 10a and 10b of a photodetector for track deviation detection are arranged for a totally diffracted luminous flux 17, and second light receiving parts 18a and 18b of a photodetector for medium inclination detection are arranged in the area to which the diffracted luminous flux 17 is not projected. That is, not only the totally diffracted luminous flux 17 is moved in parallel but also the distribution of light intensity of this luminous flux 17 is changed when the medium is inclined. Consequently, the differential output signal of light receiving parts 10a and 10b of the photodetector for track deviation detection is corrected with the differential output signal of light receiving parts 18a and 18b of the photodetector for medium inclination detection, and the latter differential output signal is controlled to a minimum. Thus, stable track deviation control is performed.

公开(公告)号：JPS63252000A

公开(公告)日：1988-10-19

申请号：JP8740487

申请日：1987-04-08

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： MOROOKA KIICHI ,  YASUDA KENICHI

IPC: G11C29/00 ,  G11C29/04 ,  H01L27/10

Abstract: PURPOSE:To improve the redundant circuit of a serial access memory by determining whether or not the replacing of a data register and a spare data register is executed according to whether or not the output signal from a serial selector is supplied to a combined capacity of a sense line for a spare column and a serial selector output line. CONSTITUTION:The device is equipped with plural data registers 1a-1c, a serial selector 3, a spare data register 1d, a spare data register selecting circuit, etc. The spare data register selecting circuit has a capacity between serial selector output lines 4a-4c to transmit the output signal from the serial selector 3 and a sense line 10 for a spare column and determines whether or not the replacing of the data registers 1a-1c and the spare data register 1d is executed according to whether the output signal is supplied to the capacity or not. The control of the selection and non-selection of the spare data register 1d is executed by the output signal of the serial selector 3. Consequently, even by using the spare data register 1d, the input output of a SAM part can be normally executed.

公开(公告)号：JPS63209139A

公开(公告)日：1988-08-30

申请号：JP4184087

申请日：1987-02-25

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： YASUDA KENICHI ,  ARIMOTO KAZUTAMI

IPC: H01L21/82 ,  G11C19/00 ,  G11C19/28 ,  H01L27/10

Abstract: PURPOSE:To provide a redundancy in a shift register by providing a spare register and a second route which passes the spare register in the shift register, and melting a fuse to make a second route conductive. CONSTITUTION:A spare register 3 having the same function as those of registers 1a-1d, and second routes 4a, 4b which are conducted with a next stage through the register 3 instead of the register to be substituted are provided to select a normal route and second routes 4a, 4b by the program of fuses 5a-5f. Accordingly, the fuses 5a-5f are melted to be programmed to make the routes 4a, 4b conductive, and to substitute a register to be substituted, e.g., the register 1b for the register 3. Thus, a redundancy can be provided in the shift register.