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    Charged particle beam apparatus provided with the aberration corrector and aberrations corrector
    5.
    发明专利
    Charged particle beam apparatus provided with the aberration corrector and aberrations corrector 有权

    公开(公告)号：JP5237734B2

    公开(公告)日：2013-07-17

    申请号：JP2008244927

    申请日：2008-09-24

    Applicant: 日本電子株式会社

    Inventor： 英敬 沢田 ,  行人 近藤

    IPC: H01J37/153

    CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/1532 ,  H01J2237/1534

    Abstract: An aberration corrector (10) is offered which has a simple structure and corrects spherical aberration and 6-fold astigmatism in a charged particle beam system. The corrector has two stages of dodecapole (12-pole) elements (12, 13) each of which has first through twelfth poles (31a-311) arranged in this order. Exciting coils are mounted at the poles, respectively, of each of the dodecapole elements. The exciting coils of the (4 n + 1)th poles and the exciting coils of the (4 n + 2)th poles are alternately connected in series (where n = 0, 1, or 2) to produce magnetic fields which are identical in absolute value but mutually opposite in sense relative to the optical axis (11) within a plane perpendicular to the axis. The exciting coils of the (4 n + 3)th poles and the exciting coils of the (4 n + 4) th poles are alternately connected in series to produce magnetic fields which are identical in absolute value but mutually opposite in sense relative to the optical axis (11) within the plane perpendicular to the axis. Consequently, a superimposition of the magnetic fields of 3-fold symmetry and the magnetic fields of 6-fold symmetry capable of being rotated around the optical axis is produced.

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