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公开(公告)号:JP6178087B2
公开(公告)日:2017-08-09
申请号:JP2013051708
申请日:2013-03-14
Applicant: 浜松ホトニクス株式会社
Inventor: 山下 雄一
IPC: H01J61/54 , H01J61/80
CPC classification number: H01J61/56 , H01J61/80 , H05B41/32