公开(公告)号：JP2008013406A

公开(公告)日：2008-01-24

申请号：JP2006186821

申请日：2006-07-06

Applicant: Air Water Inc ,  エア・ウォーター株式会社

Inventor： YASUDA TAKAHIKO ,  SUENAGA JUNYA ,  MATSUBAYASHI RYOSUKE ,  OKU HIDEHIKO ,  OMORI NOBUNORI

IPC: C01C1/12 ,  B01D3/14 ,  B01D53/58 ,  H01L21/205

CPC classification number: Y02A50/2346

Abstract: PROBLEM TO BE SOLVED: To provide a method for recovering ammonia where high purity ammonia is recovered from an exhaust gas exhausted from nitride semiconductor fabrication equipment in such a manner that the concentration of impurities is reduced at most to ≤50 ppb, to provide a method for reutilizing ammonia, to provide an ammonia recovery system, and to provide an ammonia reutilization system. SOLUTION: The method for recovering ammonia is provided with: a stage where a reaction product of ammonia and organic metals, and organic metals are removed from an ammonia-containing exhaust gas exhausted from nitride semiconductor fabrication equipment 11, so as to obtain a gaseous mixture; a stage where crude gaseous ammonia is separated from the gaseous mixture; a stage where the crude gaseous ammonia is liquified, so as to obtain liquified crude ammonia; and a stage where the liquified crude ammonia is distilled, thus impurities are removed from the liquified crude ammonia, so as to obtain high purity ammonia. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 待解决的问题：提供一种从氮化物半导体制造装置排出的废气中回收高纯度氨的方法，其中杂质的浓度最多降低至≤50ppb，以至 提供一种再利用氨的方法，提供氨回收系统，并提供一种氨回收系统。 解决方案：回收氨的方法具有：从氮化物半导体制造设备11排出的含氨废气中除去氨和有机金属的反应产物和有机金属的阶段，以获得 气体混合物; 从气态混合物中分离粗气态氨的阶段; 使粗气态氨液化的阶段，以获得液化的粗氨; 将液化的粗氨蒸馏的阶段，从液化的粗氨中除去杂质，得到高纯度的氨。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2007003097A

公开(公告)日：2007-01-11

申请号：JP2005183898

申请日：2005-06-23

Applicant: Air Water Inc ,  エア・ウォーター株式会社

Inventor： YOSHINO AKIRA ,  TANAKA KOJI ,  MATSUBAYASHI RYOSUKE ,  SUENAGA JUNYA ,  OKUMURA SHINYA

IPC: F25J3/04 ,  C01B21/04

CPC classification number: F25J3/04181 ,  F25J3/04157 ,  F25J3/0423 ,  F25J3/04254 ,  F25J3/04412 ,  F25J3/04824 ,  F25J2200/90 ,  F25J2205/70 ,  F25J2210/42 ,  F25J2210/50 ,  F25J2215/50 ,  F25J2290/62

Abstract: PROBLEM TO BE SOLVED: To provide a nitrogen generating method capable of substantially reducing power consumption, amount of cold and equipment costs by substantially reducing amount of material air.
SOLUTION: The compressed air introduced into a high-pressure tower 11 is cryogenically separated so that liquid air 13 is stored at a bottom portion, nitrogen is taken out from an upper portion in a gas state, the liquid air 13 at the bottom portion of the high-pressure tower 11 is introduced to a low-pressure tower 12, the liquid air 13 introduced into the low-pressure tower 12 is cryogenically separated so that oxygen-enriched liquid air 22 is stored at the bottom portion, nitrogen is taken out from the upper portion as a product gas in a gas state, nitrogen taken out from the upper portion of the high-pressure tower 11 is introduced into a condenser 16 to be liquefied, a part of the liquid nitrogen is refluxed to the high-pressure tower 11, the residual is supplied to the upper portion of the low-pressure tower 12, and the liquid nitrogen or liquid oxygen as cold is introduced into the low-pressure tower from the outside of a system. The liquid air 13 taken out by a taking-out pipe 20 is introduced from a part having the number of theoretical stages within a range of 1-10 stages from a tower bottom portion side in a rectifying portion 12a of the low-pressure tower 12.
COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供一种能够通过大幅减少材料空气量而大大降低功耗，冷量和设备成本的氮气发生方法。 解决方案：引入高压塔11的压缩空气被低温分离，使得液体空气13储存在底部，氮气以气体状态从上部取出，液体空气13在 将高压塔11的底部引入低压塔12，引入低压塔12的液体空气13被低温分离，使得富氧液体空气22储存在底部，氮 作为气体状态的产物气体从上部取出，从高压塔11的上部取出的氮气被引入冷凝器16中以液化，一部分液氮回流到 高压塔11将剩余物供给到低压塔12的上部，冷却的液氮或液氧从系统的外部被引入低压塔。 由取出管20取出的液体空气13从低压塔12的整流部12a的塔底部侧的理论级数为1〜10级的部分导入 。版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2006022854A

公开(公告)日：2006-01-26

申请号：JP2004199561

申请日：2004-07-06

Applicant: Air Water Inc ,  エア・ウォーター株式会社

Inventor： YOSHINO AKIRA ,  TANAKA KOJI ,  MATSUBAYASHI RYOSUKE ,  HOSOYA KIMINORI

IPC: F17C9/00 ,  F17C3/02 ,  F17C6/00

Abstract: PROBLEM TO BE SOLVED: To provide a large-sized cryogenic liquefied gas reservoir enabling a simple filling operation, reduced in the cost of a facility, enabling the easy control of flow, and preventing BOG (boil-off gas) from producing.
SOLUTION: This large-sized cryogenic liquefied gas reservoir comprises a plurality of inner reservoirs 2 to 5 and a cold insulating reservoir 1 storing the inner reservoirs 2 to 5. The inner reservoir 2 is an inner reservoir 2 used exclusively for filling a cryogenic liquefied gas from a lorry 6 into the inner reservoir 2 by utilizing a difference in operating pressure between the lorry 6 and the inner reservoir 2. A feed pump 7 for feeding and filling the cryogenic liquefied gas taken out from the exclusively used inner reservoir 2 to those reservoirs 3 to 5 other than the exclusively used inner reservoir 2 is installed in an LNG retrieval pipe 10 extended from the exclusively used inner reservoir 2.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种大型低温液化气储罐，能够进行简单的灌装操作，降低设备成本，能够容易地控制流量，并且防止BOG（蒸发气体）产生 。 解决方案：这种大型低温液化气储层包括多个内部储存器2至5和一个储存内储存器2至5的冷藏储存器1.内储存器2是专门用于填充 通过利用货车6和内部储存器2之间的操作压力的差异，从货车6到内部储存器2的低温液化气体。用于进料和填充从专用的内部储存器2中取出的低温液化气体的进料泵7 除了独家使用的内部储存器2之外的那些储存器3至5安装在从专门使用的内部储存器2延伸的LNG取出管10中。（C）2006年，JPO＆NCIPI

公开(公告)号：JP2005024214A

公开(公告)日：2005-01-27

申请号：JP2003270292

申请日：2003-07-02

Applicant: Air Water Inc ,  エア・ウォーター株式会社

Inventor： MATSUBAYASHI RYOSUKE ,  MURAKAMI NAOZO ,  SUENAGA JUNYA

IPC: F25J3/02 ,  C07C17/383 ,  C07C19/08

Abstract: PROBLEM TO BE SOLVED: To provide a separating/refining device for a fluorine compound gas capable of being operated with a stable high recovery rate, and having high cost performance.
SOLUTION: This device is constituted to separate and refine the fluorine compound gas from a feed gas including several kinds of fluorine compound gases of various boiling points. This device comprises a first refinery tower 1 for separating the fluorine compound gas of comparatively high boiling point as the liquid of a tower bottom part by cryogenic separation, adsorption towers 3a, 3b for adsorbing and separating the remaining fluorine compound gas of high boiling point from a top-part gas derived from a tower top part of the first refinery tower 1, and a second refinery tower 2 for separating the fluorine compound gas of low boiling point having the boiling point lower than that of the fluorine compound gas of high boiling point from the gas derived from the adsorption towers 3a, 3b, as the liquid of the tower bottom part by cryogenic separation.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种能够以稳定的高回收率操作并具有高性价比的氟化合物气体的分离/精制装置。 解决方案：该装置构成为从包括各种沸点的多种氟化合物气体的进料气体中分离和精制氟化合物气体。 该装置包括：第一炼油塔1，用于通过低温分离分离塔底部分液体的比较高沸点的氟化合物气体，用于吸附和分离残留的高沸点氟化合物气体的吸附塔3a，3b; 来自第一炼油塔1的塔顶部的顶部气体和第二炼油塔2，用于分离沸点低于高沸点氟化合物气体的低沸点氟化合物气体 来自吸附塔3a，3b的气体，通过低温分离作为塔底部的液体。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2009269793A

公开(公告)日：2009-11-19

申请号：JP2008121858

申请日：2008-05-08

Applicant: Air Water Inc ,  エア・ウォーター株式会社

Inventor： NARITA SATORU ,  AKASAKA HIDESHI ,  MATSUBAYASHI RYOSUKE

IPC: C01B32/40 ,  B01J23/89 ,  C01B3/38 ,  C01B3/48 ,  C01B3/56

CPC classification number: Y02P20/52

Abstract: PROBLEM TO BE SOLVED: To provide a carbon monoxide gas generation apparatus which enables a high yield of carbon monoxide and operation with reduced maintenance. SOLUTION: The apparatus includes a reactor adapted to have a hydrocarbon gas, an oxygen gas and steam introduced therein as raw gases and cause the raw gases to undergo contact reaction on a catalyst to thereby carry out combustion reaction and transformation reaction of the hydrocarbon gas into a carbon monoxide gas as a mixed gas which is rich in hydrogen gas and high in carbon monoxide gas concentration. Further, a gas containing hydrogen is introduced at the downstream of the reactor. Thereby, a high yield of the carbon monoxide and the operation with reduced maintenance are made possible. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 解决的问题：提供一氧化碳气体发生装置，其能够实现高产率的一氧化碳和操作，同时减少维护。 解决方案：该装置包括一个反应器，该反应器适于具有烃气体，氧气和作为原料气体引入的蒸气，并使原料气体在催化剂上进行接触反应，从而进行燃烧反应和转化反应 烃气体作为富含氢气和一氧化碳气体浓度高的混合气体的一氧化碳气体。 此外，在反应器的下游引入含有氢的气体。 因此，可以实现高产率的一氧化碳和减少维护的操作。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2006022855A

公开(公告)日：2006-01-26

申请号：JP2004199562

申请日：2004-07-06

Applicant: Air Water Inc ,  エア・ウォーター株式会社

Inventor： YOSHINO AKIRA ,  TANAKA KOJI ,  MATSUBAYASHI RYOSUKE ,  HOSOYA KIMINORI

IPC: F17C9/00 ,  F17C6/00

Abstract: PROBLEM TO BE SOLVED: To provide a large-sized cryogenic liquefied gas reservoir device enabling a simple filling operation, reduced in the cost of a facility, enabling the easy control of flow, and preventing BOG (boil-off gas) from producing. SOLUTION: This large-sized cryogenic liquefied gas reservoir device comprises a plurality of reservoirs 1 to 4 for filling a cryogenic liquefied gas. The plurality of reservoirs 1 to 4 are formed of an inner and outer double reservoir having inner reservoirs and outer reservoirs 1a to 4a. The reservoir 1 is a reservoir 1 used exclusively for filling the cryogenic liquefied gas from a lorry 5 into the reservoir 1 by utilizing a difference in operating pressure between the lorry 5 and the reservoir 1. A feed pump 6 for feeding and filling the cryogenic liquefied gas taken out from the exclusively used reservoir 1 to those reservoirs 2 to 4 other than the exclusively used reservoir 1 is installed in an LNG retrieval pipe 10 extended from the exclusively used reservoir 1. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种能够进行简单的填充操作的大型低温液化气储存装置，降低了设备的成本，使得能够容易地控制流量，并且防止BOG（蒸发气体） 生产。 解决方案：这种大型低温液化气储存装置包括用于填充低温液化气体的多个储存器1至4。 多个储存器1至4由具有内部储存器和外部储存器1a至4a的内部和外部双重储存器形成。 储存器1是专门用于通过利用货车5和储存器1之间的操作压力的差异将低温液化气体从货车5填充到储存器1中的储存器1.用于进料和填充低温液化的进料泵6 从独家使用的储存器1中取出的气体除了专门使用的储存器1之外的那些储存器2至4上安装在从专用储存器1延伸的LNG取出管10中。版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005331043A

公开(公告)日：2005-12-02

申请号：JP2004150399

申请日：2004-05-20

Applicant: Air Water Inc ,  エア・ウォーター株式会社

Inventor： YOSHINO AKIRA ,  TANAKA KOJI ,  MATSUBAYASHI RYOSUKE ,  HOSOYA KIMINORI

IPC: F17C3/08 ,  F17C3/00

Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method of a cryogenic liquefied gas storage tank for reducing transport cost, without requiring the wide installation area, reducing the quantity of cold insulator used, capable of setting strength of a foundation structure and a support structure small, without substantially requiring labor for moisture control, without requiring a construction space, without reducing heat insulating performance, easily conforming a construction state, and superior in maintainability.
SOLUTION: A concrete foundation 1 is arranged on an installation surface 1a, and a stand 2 is arranged on an upper surface of this foundation 1. A body part 7 of an outer tank 6 is manufactured on the stand 2 by using a plurality of outer tank body plates 9a bent in a curved shape. A laminated body 10a of the cold insulator 10 is stuck to an inner peripheral surface of this body part 7. After storing and juxtaposing a plurality of inner tanks 3 to be filled with liquefied gas inside from an upper surface opening part of the body part 7, the upper surface opening part of the body part 7 is airtightly sealed by a ceiling part 8, and an inside space of the body part 7 is evacuated.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 解决的问题：为了提供一种用于降低运输成本的低温液化气储罐的制造方法，而不需要宽的安装面积，减少了使用的冷绝缘体的数量，能够设定基础结构的强度和 支撑结构小，而不需要施工空间，而不会降低绝热性能，容易符合施工状态，并且维护性优异，基本上不需要用于水分控制的劳动。 解决方案：在安装表面1a上设置混凝土基础1，在该基础1的上表面上设置有支架2.外筒6的主体部7通过使用 多个弯曲形状的外箱体板9a。 冷却绝缘体10的层叠体10a粘贴在本体部7的内周面上。从主体部7的上表面开口部分储存并并置多个容纳有液化气体的内箱3 ，主体部7的上表面开口部被天花板部8气密地密封，并且主体部7的内部空间被抽真空。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2009263199A

公开(公告)日：2009-11-12

申请号：JP2008122058

申请日：2008-05-08

Applicant: Air Water Inc ,  エア・ウォーター株式会社

Inventor： NARITA SATORU ,  MATSUDA HIDEAKI ,  MATSUBAYASHI RYOSUKE

IPC: C01B32/40 ,  B01J23/89 ,  C01B3/38

CPC classification number: Y02P20/52

Abstract: PROBLEM TO BE SOLVED: To provide a carbon monoxide gas generation apparatus that exhibits a high yield of carbon monoxide gas and can be operated with reduced maintenance. SOLUTION: High yield of carbon monoxide gas and operation with reduced maintenance can be attained by providing a reactor into which a hydrocarbon gas, an oxygen-based gas and steam are introduced as raw gases and which generates carbon monoxide gas as a mixed gas rich in hydrogen gas and high in carbon monoxide gas concentration by subjecting the raw gases to a catalytic reaction on a catalyst to thereby carry out a combustion reaction and a conversion reaction of the hydrocarbon gas, and introducing steam to the downstream of the reactor. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 解决的问题：提供一氧化碳气体产生装置，其显示高产率的一氧化碳气体并且可以在减少维护的情况下操作。 解决方案：通过提供一种反应器可以获得高产量的一氧化碳气体和减少维护的操作，其中将烃气体，氧气基气体和蒸汽作为原料气体引入其中，并产生作为混合物的一氧化碳气体 通过使原料气体在催化剂上进行催化反应，从而进行烃气体的燃烧反应和转化反应，并将蒸汽引入反应器的下游，从而富含氢气和高一氧化碳气体浓度。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2008290905A

公开(公告)日：2008-12-04

申请号：JP2007137558

申请日：2007-05-24

Applicant: Air Water Inc ,  エア・ウォーター株式会社

Inventor： NARITA SATORU ,  MATSUDA HIDEAKI ,  MATSUBAYASHI RYOSUKE ,  AOKI KANJI

IPC: C01B3/38 ,  B01J23/89 ,  C23C8/20

CPC classification number: Y02P20/52

Abstract: PROBLEM TO BE SOLVED: To provide an apparatus for generating an atmospheric gas for carburization, capable of inexpensively and safely generating a carburizing gas having a high carbon potential. SOLUTION: The apparatus for generating an atmospheric gas for carburization includes a reactor 1 into which a hydrocarbon-based gas, an oxygen-based gas and steam are introduced as raw material gases, and which brings the raw material gases into a catalytic reaction with a catalyst to cause a combustion reaction and modification reaction of the hydrocarbon-based gas, thereby generating an atmospheric gas for carburization rich with hydrogen gas and having a high carbon monoxide gas concentration. Since the oxygen-based gas is used as raw material in place of air, the atmospheric gas for carburization having a high carbon potential can be obtained. Since steam is used as raw material, the apparatus ensures a lowered explosion limit and improved safety as compared with an apparatus using only a hydrocarbon-based gas and oxygen as raw materials. The cost of the raw material gases is low and the carburizing gas having a high carbon potential can safely and inexpensively be generated. COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 解决的问题：提供一种能够廉价且安全地生成具有高碳电势的渗碳气体的渗碳气体生成装置。 解决方案：用于产生用于渗碳的大气气体的装置包括反应器1，其中引入烃类气体，氧气基气体和蒸汽作为原料气体，并将原料气体引入催化剂 与催化剂反应引起烃类气体的燃烧反应和改性反应，从而产生富含氢气并具有高一氧化碳气体浓度的渗碳气氛。 由于氧基气体用作代替空气的原料，因此可以获得具有高碳电势的渗碳气氛气体。 由于使用蒸汽作为原料，与仅使用烃类气体和氧气作为原料的装置相比，该装置确保了爆炸下限和提高的安全性。 原料气体的成本低，碳酸势高的渗碳气体可以安全且廉价地产生。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2005009755A

公开(公告)日：2005-01-13

申请号：JP2003173618

申请日：2003-06-18

Applicant: Air Water Inc ,  エア・ウォーター株式会社

Inventor： MIYAMOTO ATSUSHI ,  MATSUBAYASHI RYOSUKE ,  MIYAMOTO HIDEKI ,  SUENAGA JUNYA

IPC: F25J3/04 ,  C01B21/04

CPC classification number: F25J3/04254 ,  F25J3/04278 ,  F25J3/04333 ,  F25J3/04351 ,  F25J3/04424 ,  F25J3/04454 ,  F25J2210/42 ,  F25J2240/12 ,  F25J2245/42 ,  F25J2270/91

Abstract: PROBLEM TO BE SOLVED: To provide an air separating method capable of enhancing purity of a product, and not requiring heightening of a rectifying column. SOLUTION: In the method for carrying out cryogenic separation of air in the rectifying column, accumulating liquid air in a bottom, and taking out a desired component from a top part in a gas state, a plurality of horizontally arranged small rectifying columns 1 and 2 are used as the rectifying column, and the total tray number of rectification trays 1a and 2a of each small rectifying column 1 and 2 is set so that it is the theoretical tray number necessary for concentrating the desired component. When manufacturing the desired component in high purity by introducing the desired component taken out of one small rectifying column 1 into the other small rectifying column 2 in a gas state, and taking out nitrogen-containing liquid 10 accumulated in a bottom of the small rectifying column 2 and supplying it to a top part of the one small rectifying column 1 between each small rectifying column 1 and 2, the desired component taken out of the one small rectifying column 1 is introduced into the other small rectifying column 2 after introducing it into a gas booster 4 and pressurizing it, and the nitrogen-containing liquid 10 in a lower part of the other small rectifying column 2 is supplied to the top part of the one small rectifying column 1 by the pressure difference. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供能够提高产品纯度并且不需要提高精馏塔的空气分离方法。 解决方案：在精馏塔中进行空气的低温分离的方法中，在底部积聚液体空气，并从气体状态的顶部取出所需的成分，多个水平排列的小型精馏塔 1和2用作精馏塔，每个小精馏塔1和2的整流塔板1a和2a的总托盘数量设定为使浓缩所需组分所需的理论塔盘数。 当通过将从一个小精馏塔1中取出的所需组分以气体状态引入另一个小精馏塔2中制备高纯度的所需组分，并且取出积聚在小精馏塔底部的含氮液体10 2并将其供给到每个小排气柱1和2之间的一个小排气塔1的顶部时，从一个小精馏塔1中取出的所需组分在将其引入到另一个小精馏塔2中之后 气体增压器4并对其加压，而另一个小精馏塔2的下部的含氮液体10通过压力差供给到一个小精馏塔1的顶部。 版权所有（C）2005，JPO＆NCIPI