公开(公告)号：JP2014017502A

公开(公告)日：2014-01-30

申请号：JP2013179767

申请日：2013-08-30

申请人： Dow Corning Corp ,  ダウ コーニング コーポレーションDow Corning Corporation

发明人： ZHOU XIAOBING

IPC分类号： H01L21/318 ,  C23C16/42 ,  H01L21/316

CPC分类号： H01L21/02271 ,  B05D1/62 ,  C23C16/30 ,  C23C16/345 ,  C23C16/36 ,  C23C16/401 ,  C23C16/45553 ,  H01L21/02126 ,  H01L21/02167 ,  H01L21/02219 ,  H01L21/02274 ,  H01L21/3148 ,  H01L21/31633 ,  H01L21/3185

摘要： PROBLEM TO BE SOLVED: To provide a precursor on which a silicon-containing film can be deposited under low temperature.SOLUTION: A silicon-containing thin film is formed by thermal polymerization of a reaction gas mixture of bis-amino silacyclobutane, and a material gas selected from nitrogen supply gas, oxygen supply gas and their mixtures. The deposition film may be silicon nitride, silicon carbonitride, silicon dioxide or carbon-doped silicon dioxide. These films are useful as a dielectric, a passivation film, a barrier film, a spacer, a liner and/or a stressor in a semiconductor device.

摘要翻译： 要解决的问题：提供一种在低温下可沉积含硅膜的前体。解决方案：通过双氨基硅杂环丁烷的反应气体混合物和材料的热聚合形成含硅薄膜 选自氮气供气，供氧气体及其混合物的气体。 沉积膜可以是氮化硅，碳氮化硅，二氧化硅或碳掺杂的二氧化硅。 这些膜可用作半导体器件中的电介质，钝化膜，阻挡膜，间隔物，衬垫和/或应力源。

公开(公告)号：JP2013067604A

公开(公告)日：2013-04-18

申请号：JP2012092407

申请日：2012-04-13

申请人： Dow Corning Corp ,  ダウ コーニング コーポレーションDow Corning Corporation

发明人： BACKER MICHAEL WOLFGANG ,  GOHNDRONE JOHN ,  KLEYER DON LEE ,  ZHOU XIAOBING

IPC分类号： C07F7/18 ,  B60C1/00 ,  C07B61/00 ,  C08K3/00 ,  C08K5/541 ,  C08L9/00

CPC分类号： B01J31/0239 ,  B01J2231/4288 ,  B01J2531/985 ,  C07F7/1836

摘要： PROBLEM TO BE SOLVED: To provide a method for producing bis(alkoxysilylalkyl)fumarate more quickly, at a lower temperature and/or with less byproducts than the conventional methods for producing the bis(alkoxysilylalkyl)fumarate, since the bis(alkoxysilylalkyl)fumarate such as bis(triethoxysilylpropyl)fumarate is useful in tire formulation.SOLUTION: This method for producing a reaction product containing the bis(alkoxysilylorgano)dicarboxylate includes a step (1) of reacting a composition containing (a) a haloorganoalkoxysilane, (b) a dimetal salt of a dicarboxyl functional compound and (c) a phase transfer catalyst containing a bicyclic amidine, a quaternary iminium compound of the bicyclic amidine or their combinations.

摘要翻译： 待解决的问题：为提供富马酸二（烷氧基甲硅烷基烷基）富马酸酯的方法，在比制备双（烷氧基甲硅烷基烷基）富马酸盐的常规方法更低的温度和/或更少的副产物下，因为双（烷氧基甲硅烷基烷基 ）富马酸盐如双（三乙氧基甲硅烷基丙基）富马酸盐可用于轮胎制剂。 解决方案：制备含有双（烷氧基甲硅烷基有机）二羧酸酯的反应产物的方法包括使含有（a）卤代有机烷氧基硅烷，（b）二羧酸官能化合物的二盐和（c ）含有双环脒的相转移催化剂，双环脒的季铵化合物或其组合。 版权所有（C）2013，JPO＆INPIT