Chemically amplified resist resin
    1.
    发明专利
    Chemically amplified resist resin 有权
    化学稳定树脂

    公开(公告)号:JP2008001914A

    公开(公告)日:2008-01-10

    申请号:JP2007237691

    申请日:2007-09-13

    Abstract: PROBLEM TO BE SOLVED: To provide a chemically amplified resist resin having high sensitivity and high resolution. SOLUTION: The chemically amplified resist resin has a monomer content of 0.1 mass% or less. It is preferred that the chemically amplified resist resin is a (co)polymer containing ≥50 mass% of a (meth)acrylic ester monomer unit. Such a chemically amplified resist resin can be prepared, for example, by purification through a process of separating the resin after the dispersion in a 1-3C alcohol at 30-70°C at least for one minute. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供具有高灵敏度和高分辨率的化学放大抗蚀剂树脂。 解决方案:化学放大抗蚀剂树脂的单体含量为0.1质量%以下。 优选化学增幅抗蚀剂树脂是含有(甲基)丙烯酸酯单体单元的≥50质量%的(共)聚合物。 这种化学放大抗蚀剂树脂可以通过例如通过在分散在1-3℃醇中的树脂在30-70℃下分离树脂至少1分钟的方法进行纯化来制备。 版权所有(C)2008,JPO&INPIT

    Manufacturing method of vinyl polymer composition
    2.
    发明专利
    Manufacturing method of vinyl polymer composition 审中-公开
    乙烯基聚合物组合物的制备方法

    公开(公告)号:JP2005187505A

    公开(公告)日:2005-07-14

    申请号:JP2003427040

    申请日:2003-12-24

    Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method of a vinyl polymer composition which allows enhancement of polymer properties and increase in the productivity by effective increase in the polymerization ratio.
    SOLUTION: The manufacturing method of the vinyl polymer composition comprises feeding raw materials including vinyl monomers to a first tank-type reactor (A), continuously drawing out the resultant partial polymer composition (B), and further polymerizing the vinyl monomers remaining in the partial polymer composition (B) to obtain the polymer composition having a remaining vinyl monomer content of at most 2%, where the partial polymer composition (B) is accumulated in a second tank-type reactor (C) and is simultaneously subjected to the polymerization reaction in the second tank-type reactor (C).
    COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 解决的问题:提供通过有效地提高聚合比可以提高聚合物性能和提高生产率的乙烯基聚合物组合物的制造方法。 解决方案:乙烯基聚合物组合物的制造方法包括将包含乙烯基单体的原料进料到第一罐型反应器(A)中,连续抽出所得部分聚合物组合物(B),并进一步聚合剩余的乙烯基单体 在部分聚合物组合物(B)中,得到残留的乙烯基单体含量至多为2%的聚合物组合物,其中部分聚合物组合物(B)在第二槽式反应器(C)中积聚并同时经受 第二罐式反应器(C)中的聚合反应。 版权所有(C)2005,JPO&NCIPI

    Methacrylic polymer and its manufacturing method
    3.
    发明专利
    Methacrylic polymer and its manufacturing method 审中-公开
    甲基丙烯酸聚合物及其制造方法

    公开(公告)号:JP2005082716A

    公开(公告)日:2005-03-31

    申请号:JP2003316967

    申请日:2003-09-09

    Abstract: PROBLEM TO BE SOLVED: To provide a methacrylic polymer superior in colorless transparency and also in thermal decomposition resistance. SOLUTION: In the methacrylic polymer which contains 88-100 mass% of methyl methacrylate units and 0-12 mass% of 1-8C alkyl acrylate units, the total sulfur concentration in sulfur-based compounds not bonded to the end of the polymer and obtained by a gas chromatograply with a sulfur chemiluminescence detector is 5 ppm or lower, the bonded sulfur amount X(mass%) at the end of the polymer is within the following expression(1), 75(mass%)≤(X/32)×Mn≤100(mass%), where Mn expresses the number-average molecular weight of the methacrylic polymer. COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题:提供优异的无色透明性和耐热分解性的甲基丙烯酸类聚合物。 解决方案:在含有88-100质量%的甲基丙烯酸甲酯单元和0-12质量%的1-8C烷基丙烯酸酯单元的甲基丙烯酸类聚合物中,未结合到硫末端的硫基化合物中的总硫浓度 通过硫化学发光检测器气相色谱法得到的聚合物的聚合物末端的接合硫量X(质量%)在以下表达式(1)中,75(质量%)≤(X / 32)×Mn≤100(质量%),其中Mn表示甲基丙烯酸系聚合物的数均分子量。 版权所有(C)2005,JPO&NCIPI

    Method for producing syrup and apparatus therefor
    4.
    发明专利
    Method for producing syrup and apparatus therefor 审中-公开
    用于生产SYRUP及其装置的方法

    公开(公告)号:JP2005042022A

    公开(公告)日:2005-02-17

    申请号:JP2003278162

    申请日:2003-07-23

    Inventor: MIZOTA HIROTOSHI

    Abstract: PROBLEM TO BE SOLVED: To provide a method for producing a syrup while suppressing the runaway reaction even in the unintentional stop of utility supply to prevent the damage of the reactor and provide an apparatus for the production of syrup. SOLUTION: A syrup having a polymer content of 1-40% is produced by partly polymerizing a methyl methacrylate monomer in a reactor while boiling the monomer under atmospheric pressure. A condenser satisfying formula (1): CW×W×Hr 4 ×S is placed in the vapor phase or at the outside directly connected to the vapor phase and the evaporated monomer is condensed with the condenser and returned to the reaction liquid. In the formulas, CW is the polymer conversion (=0.01 to 0.4), W is the charged amount (kg) of the monomer, Hr is heat of reaction (kJ/kg) of the monomer, Q is the heat capacity (kJ/°C) of the condenser and S is the condensing area (m 2 ) of the condenser. The production apparatus is furnished with the condenser. COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题:即使在公用事业供应的无意停止的同时抑制失控反应来提供糖浆的制造方法,以防止反应器的损坏并提供制造糖浆的装置。 解决方案:聚合物含量为1-40%的糖浆通过在大气压下沸腾单体的同时在反应器中部分聚合甲基丙烯酸甲酯单体而制备。 满足式(1)的冷凝器:CW×W×Hr 4 ×S置于气相或 直接连接到气相的外部和蒸发的单体与冷凝器冷凝并返回到反应液体中。 在公式中,CW是聚合物转化率(= 0.01〜0.4),W是单体的带电量(kg),Hr是单体的反应热(kJ / kg),Q是热容(kJ / ℃),S是冷凝器的冷凝面积(m 2 )。 生产设备配有冷凝器。 版权所有(C)2005,JPO&NCIPI

    Method for producing methacrylate resin sheet

    公开(公告)号:JP2004225011A

    公开(公告)日:2004-08-12

    申请号:JP2003017821

    申请日:2003-01-27

    Abstract: PROBLEM TO BE SOLVED: To produce a methacrylate resin sheet substantially free from appearance defects such as polymerization foaming and voids with good productivity by effectively reducing the concentration of dissolved oxygen in monomers.
    SOLUTION: A method for producing a methacrylate resin sheet comprises the steps of supplying a raw material comprising solely methyl methacrylate or a monomer mixture of 60 mass% or more of methyl methacrylate and 40 mass% or less of an acrylic ester into a polymerization vessel in which oxygen concentration is reduced to 3 mass% or less by supplying gaseous nitrogen beforehand, obtaining a methacrylate syrup by polymerizing part of the raw material with a dissolved oxygen concentration of 0.5 ppm or less in the polymerization vessel in the presence of a radical initiator such that the content of the polymer is from 10 mass% to 35 mass%, and polymerizing the methacrylate syrup obtained in the polymerization vessel by pouring the same into a mold.
    COPYRIGHT: (C)2004,JPO&NCIPI

    Belt type continuous plate manufacturing apparatus and method for manufacturing plate-shaped polymer

    公开(公告)号:JP2004188707A

    公开(公告)日:2004-07-08

    申请号:JP2002357915

    申请日:2002-12-10

    Abstract: PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a plate-shaped polymer enhanced in thickness preciseness regardless of the belt width of the apparatus, and a method for manufacturing the polymer. SOLUTION: This belt type continuous plate manufacturing apparatus is constituted so that a polymerizable raw material is supplied from one end to the space surrounded by the mutually opposed belt surfaces of two endless belts 1 and 1', of which the mutually opposed belt surfaces run in the same direction at the same speed, and the gasket 7, which is held between the belt surfaces provided to both side parts of the mutually opposed belt surfaces, to be solidified along with the running of the belts into a heating zone and the plate-shaped polymer is taken out from the other ends of the belts. As the belt surface holding mechanisms in the heating zone of the endless belts 1 and 1', a plurality of upper and lower paired rolls 4 and 4' of which the shafts cross the belt running direction at a right angle are arranged along the belt running direction and the outer diameter D of the roll body part of each of the upper and lower paired rolls 4 and 4' is set to 100-500 mm. COPYRIGHT: (C)2004,JPO&NCIPI

    METHOD FOR MANUFACTURING METHACRYLIC RESIN PLATE

    公开(公告)号:JP2002120235A

    公开(公告)日:2002-04-23

    申请号:JP2000315198

    申请日:2000-10-16

    Abstract: PROBLEM TO BE SOLVED: To manufacture a methacrylic resin plate having a high molecular weight and no foam. SOLUTION: A method for manufacturing the methacrylic resin plate comprises a stock casting step of casting a polymerizable stock containing a methyl methacrylate and a peroxide in a casting mold, a first polymerizing step of polymerizing the stock in a warm water bath or a warm water shower of 60 to 90 deg.C in a range in which a polymer conversion ratio of the stock does not exceed 60 mass%, a second polymerizing step of subsequently developing a polymerization heating peak and polymerizing the stock in the warm water bath or the warm water shower lower by 2 to 20 deg.C than the warm water bath or warm water shower temperature of the first polymerizing step until the conversion ratio becomes at least 85 mass% or more, a heat treating step of holding a temperature of a plate-like material obtained by polymerizing the stock at 110 to 140 deg.C for 3 min or more, and a cooling step to be sequentially conducted.

    SHEET PRODUCTION OF METHACRYLIC POLYMER

    公开(公告)号:JPH06239905A

    公开(公告)日:1994-08-30

    申请号:JP2567093

    申请日:1993-02-15

    Abstract: PURPOSE:To enable inexpensive production of the subject polymer by realizing the shortened polymerization time and energy saving, by adding a polymerization initiator to a methacryl syrup of a specific polymerization degree, extruding and heating it and effecting polymerization with its own polymerization heat under adiabatic conditions. CONSTITUTION:Methyl methacrylate containing 2,2'-azobis(2,4- dimethylvaleronitrile) is fed into the polymerization tank and polymerized by maintaining the temperature at 130 deg.C. Then, the polymerization mixture is sent through a gear pump into the deaerator to remove volatile substances, and mixed with a methyl methacrylate syrup of higher than 100 poise viscosity at 20 deg.C and of 30 to 60% polymerization degree, and at least one of polymerization initiators. They are thoroughly mixed in a mixer, extruded from a dice or nozzle and milled between a couple of endless belts, then heated at 50 to 100 deg.C and polymerized with its own polymerization heat under adiabatic conditions. Thus, the objective methacrylic sheet polymer is inexpensively obtained because shortened polymerization time and energy saving are realized.

Patent Agency Ranking